The formation of light emitting cerium silicates in cerium-doped silicon oxides

被引:33
作者
Li, Jing [1 ]
Zalloum, Othman
Roschuk, Tyler
Heng, Chenglin
Wojcik, Jacek
Mascher, Peter
机构
[1] McMaster Univ, Dept Engn Phys, Hamilton, ON L8S 4K1, Canada
关键词
annealing; cerium; cyclotron resonance; photoluminescence; plasma CVD; silicon compounds; thin films; transmission electron microscopy; GEL; FILMS; GLASS; CE3+;
D O I
10.1063/1.3067871
中图分类号
O59 [应用物理学];
学科分类号
摘要
Cerium-doped silicon oxides with cerium concentrations of up to 0.9 at. % were deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition. Bright cerium related photoluminescence, easily seen even under room lighting conditions, was observed from the films and found to be sensitive to film composition and annealing temperature. The film containing 0.9 at. % Ce subjected to anneal in N-2 at 1200 degrees C for 3 h showed the most intense cerium-related emission, easily visible under bright room lighting conditions. This is attributed to the formation of cerium silicate [Ce2Si2O7 or Ce-4.667 (SiO4)(3)O], the presence of which was confirmed by high resolution transmission electron microscopy.
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页数:3
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