High performance ZnO nanowire field effect transistor

被引:5
作者
Cha, SN [1 ]
Jang, JE [1 ]
Choi, Y [1 ]
Ho, GW [1 ]
Kang, DJ [1 ]
Hasko, DG [1 ]
Welland, ME [1 ]
Amaratunga, GAJ [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
来源
PROCEEDINGS OF ESSDERC 2005: 35TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2005年
关键词
D O I
10.1109/ESSDER.2005.1546624
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A zinc oxide (ZnO) nanowire field effect transistor having the highest mobility and lowest subthreshold slope obtained to date (from ZnO) is reported. The device consists of a single nanowire with self-aligned gate electrodes having well defined nano scale spacing, independent of lithographic definition. The fabricated device exhibits a transconductance of 3.06 mu S, a mobility of 450 cm(2)/Vs and a subthreshold swing of 129 mV/decade. The transistor also shows an on/off current ratio of 10(6).
引用
收藏
页码:217 / 220
页数:4
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