Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading

被引：39

作者：

Garcia-Gancedo, L. ^{[1
]}

Pedros, J. ^{[2
]}

Zhao, X. B. ^{[3
,4
]}

Ashley, G. M. ^{[5
]}

Flewitt, A. J. ^{[1
]}

Milne, W. I. ^{[1
,5
]}

Ford, C. J. B. ^{[2
]}

Lu, J. R. ^{[3
]}

Luo, J. K. ^{[6
]}

机构：

[1] Univ Cambridge, Dept Engn, Elect Engn Div, Cambridge CB3 0FA, England

[2] Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England

[3] Univ Manchester, Sch Phys & Astron, Biol Phys Grp, Manchester M13 9PL, Lancs, England

[4] Univ Sheffield, Dept Chem & Biol Engn, Sheffield S1 3JD, S Yorkshire, England

[5] Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea

[6] Univ Bolton, IMRI, Bolton BL3 5AB, England

来源：

BIOSENSORS & BIOELECTRONICS | 2012年 / 38卷 / 01期

基金：

英国工程与自然科学研究理事会;

关键词：

Piezoelectric biosensor; FBAR; Zinc oxide (ZnO); Gravimetric biosensor; ZNO; GHZ;

D O I：

10.1016/j.bios.2012.06.023

中图分类号：

Q6 [生物物理学];

学科分类号：

071011 ;

摘要：

Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：369 / 374

页数：6

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