Dielectric properties of sol-gel derived PZT(40/60)/PZT(60/40) heterolayered thin films

被引：24

作者：

Lee, SG ^{[1
]}

Lee, YH

机构：

[1] Seonam Univ, Dept Elect & Elect Engn, Chonbuk 590170, South Korea

[2] Kwangwoon Univ, Dept Elect Mat Engn, Seoul 139701, South Korea

来源：

THIN SOLID FILMS | 1999年 / 353卷 / 1-2期

关键词：

dielectric properties; sol-gel; PZT; fatigue characteristics; leakage current density;

D O I：

10.1016/S0040-6090(99)00408-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ferroelectric PZT(40/60)/PZT(60/40) heterolayered thin films were fabricated by spin-coating method on the Pt/Ti/SiO2/Si substrate alternately using PZT(40/60) and PZT(60/40) alkoxide solutions. The coating and heating procedure was repeated six times to form PZT heterolayered films. All PZT heterolayered films showed dense and homogeneous structure without the presence of rosette structure. The relative dielectric constant and the dielectric loss of the PZT-6 film were about 1200 and 3%, respectively. Increasing the number of coatings, remnant polarization increased, the coercive field decreased and the values were 30.79 mu C/cm(2) and 73.9 kV/cm, respectively. Leakage current density of the PZT-6 heterolayered film was 8 x 10(-9) A/cm(2) at 5 V. And the PZT-6 heterolayered film showed fairly good fatigue characteristics after application of 10(8) switching cycles. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：244 / 248

页数：5

共 13 条

[1] PREPARATION AND BASIC PROPERTIES OF BATIO3-BAPBO3 MULTILAYER THIN-FILMS BY METAL-ALKOXIDES METHOD [J].

AZUMA, T ;

TAKAHASHI, S ;

KUWABARA, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4089-4091

[2]

CHAPIN LN, 1990, MATER RES SOC SYMP P, V200, P153, DOI 10.1557/PROC-200-153

[3] COMPOSITION STRUCTURE PROPERTY RELATIONS OF MULTIION-BEAM REACTIVE SPUTTERED LEAD LANTHANUM TITANATE THIN-FILMS .1. COMPOSITION AND STRUCTURE-ANALYSIS [J].

FOX, GR ;

KRUPANIDHI, SB ;

MORE, KL ;

ALLARD, LF .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (11) :3039-3055

[4] EFFECT OF SUBSTRATE-TEMPERATURE ON ELECTRICAL CHARACTERISTICS OF (PB,LA)(ZR,TI)O-3 ULTRATHIN FILMS DEPOSITED BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].

HAZUMI, S ;

ASANO, T ;

HATTORI, M ;

NAKASHIMA, H ;

KOBAYASHI, I ;

OKADA, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9B) :5086-5090

[5] LOW-TEMPERATURE PREPARATION OF PB(ZR, TI)O3 THIN-FILMS ON (PB, LA)TIO3 BUFFER LAYER BY MULTI-ION-BEAM SPUTTERING [J].

KANNO, I ;

HAYASHI, S ;

KAMADA, T ;

KITAGAWA, M ;

HIRAO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4057-4060

[6] PROCESSING AND ELECTRICAL-PROPERTIES OF PB(ZRXTI1-X)O3 (X = 0.2-0.75) FILMS - COMPARISON OF METALLOORGANIC DECOMPOSITION AND SOL-GEL PROCESSES [J].

KLEE, M ;

EUSEMANN, R ;

WASER, R ;

BRAND, W ;

VANHAL, H .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (04) :1566-1576

[7] Dielectric properties of Pb(Zr,Ti)O3 heterolayered films prepared by sol-gel method [J].

Lee, SG ;

Park, IG ;

Bae, SG ;

Lee, YH .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (11) :6880-6883

[8]

LEE SG, 1998, INT C EL ENG KYUNGJ, P906

[9] FATIGUE AND REFRESHMENT OF (PB, LA)TIO3 THIN-FILMS BY MULTIPLE CATHODE SPUTTERING [J].

MAIWA, H ;

ICHINOSE, N ;

OKAZAKI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5240-5243

[10] DIELECTRIC-PROPERTIES OF MULTILAYERED FERROELECTRIC THIN-FILMS FABRICATED BY SOL-GEL METHOD [J].

OHYA, Y ;

ITO, T ;

TAKAHASHI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5272-5276

← 1 2 →