Recent developments in vacuum arc deposition

被引：34
作者：
Boxman, RL [1 ]
机构：
[1] Tel Aviv Univ, Fleischman Fac Engn, Elect Discharge & Plasma Lab, IL-69978 Tel Aviv, Israel
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 2001年 / 29卷 / 05期
关键词：
cathodic arc; coatings; filtered vacuum arc; thin films; vacuum arc;
D O I：
10.1109/27.964471
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Vacuum arc deposition (VAD) has become an established industrial art for producing hard, wear-resistant and decorative coatings. Sophisticated coatings, including tertiary compounds and multilayers, are increasingly used. Filtered VAD and hot electrode vacuum arcs are increasingly investigated to obtain high-quality, macroparticle-free films. Improved filtered sources, including large rectangular filters, have been demonstrated. Besides tool coatings, films for metallizing integrated circuits and protecting magnetic media are being developed.
引用
收藏
页码：762 / 767
页数：6
相关论文
共 49 条
  • [1] Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition
    Aksenov, II
    Khoroshikh, VM
    Lomino, NS
    Ovcharenko, VD
    Zadneprovskiy, YA
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1999, 27 (04) : 1026 - 1029
  • [2] AKSENOV II, 1978, SOV J PLASMA PHYS, V4, P425
  • [3] Vacuum arc plasma jet propagation in a toroidal duct
    Alterkop, B
    Gidalevich, E
    Goldsmith, S
    Boxman, RL
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (09) : 6791 - 6802
  • [4] Propagation of a magnetized plasma beam in a toroidal filter
    Alterkop, B
    Gidalevich, E
    Goldsmith, S
    Boxman, RL
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (07) : 873 - 879
  • [5] ALTERKOP B, 1996, J PHYSICS D, V29, P1
  • [6] Propagation of vacuum arc plasma beam in a toroidal filter
    Alterkop, BA
    Zhitomirsky, VN
    Goldsmith, S
    Berman, RL
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1996, 24 (06) : 1371 - 1377
  • [7] Twist filter for the removal of macroparticles from cathodic arc plasmas
    Anders, A
    MacGill, RA
    [J]. SURFACE & COATINGS TECHNOLOGY, 2000, 133 : 96 - 100
  • [8] S-shaped magnetic macroparticle filter for cathodic arc deposition
    Anders, S
    Anders, A
    Dickinson, MR
    MacGill, RA
    Brown, IG
    [J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1997, 25 (04) : 670 - 674
  • [9] [Anonymous], 1966, SOV PHYS DOKL
  • [10] AMORPHOUS SI THIN-FILMS PREPARED BY VACUUM ARC DEPOSITION
    ARBILLY, D
    BOXMAN, RL
    GOLDSMITH, S
    ROTHWARF, A
    KAPLAN, L
    [J]. THIN SOLID FILMS, 1994, 253 (1-2) : 62 - 66
12345