Progress of flat panel displays

被引：0

作者：

Liu, XH ^{[1
]}

Mao, DS ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China

来源：

1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/ICSICT.1998.786452

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, hydrogen-free high sp(3) content (>90 %) diamond-like carbon (DLC) film was prepared by filtered are deposition (FAD). Its electron field emission behavior and fluorescent displays are tested by using a simple diode structure. Emission current is 0.9 mu A at electric field as low as 1 V/mu m, and emission current density can be obtained about 5 mA/cm(2) at electric field as low as 20 V/mu m. Field emission current is stable. Uniform fluorescence display of electron emission from DLC film under electric field of 12 V/mu m was also obtained. It can be considered that the contribution of fine electron emission property results from its smooth surface and high sp(3) content DLC column micro-emitter array war also fabricated by ion beam etching.

引用

页码：846 / 848

页数：3

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