RF sputtered ZnO-ITO films for high temperature CO sensors

被引：20

作者：

Donato, A. ^{[2
]}

Della Corte, F. ^{[2
]}

Gioffre, M. ^{[3
]}

Donato, N. ^{[4
]}

Bonavita, A. ^{[1
]}

Micali, G. ^{[1
]}

Neri, G. ^{[1
]}

机构：

[1] Univ Messina, Dipartimento Chim Ind & Ingn Mat, I-98166 Messina, Italy

[2] Univ Mediterranea Reggio Calabria, Fac Ingn Reggio Calabria, I-89060 Reggio Di Calabria, Italy

[3] IMM CNR, Sez Napoli, Naples, Italy

[4] Univ Messina, Dipartimento Fis Mat & Ingn Elettron, I-98166 Messina, Italy

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 22期

关键词：

ZnO-ITO; RF-sputtering; CO exhaust sensors; INDIUM TIN OXIDE; SOL-GEL PROCESS; THIN-FILMS; NANOPARTICLES; PERFORMANCES;

D O I：

10.1016/j.tsf.2009.04.006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work is reported the development of ceramic sensors based on ZnO-doped ITO thin films for engine diagnostics able to withstand the harsh environments associated with exhausts. ZnO-ITO films were deposited by RF-sputtering and have been employed in the development of thin films-based carbon monoxide resistive sensors operating at high temperature (500 degrees C). ZnO-ITO films, with different Zn/In ratio and thickness around 3 mu m., have been deposited by changing the power on the targets. The effects of both the working temperature and the ZnO loading on the sensors performances were investigated. Undoped ITO film has shown negligible response to CO, whereas ZnO-ITO films were found to be sensitive at the required working temperatures. The reported results show how the ZnO-ITO devices under study can be promising sensors for CO monitoring in real exhausts of car engines. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：6184 / 6187

页数：4

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