Multi-functional photoacoustic microscope and its applications to NDE of surface and undersurface defects

被引:1
作者
Ishikawa, K [1 ]
Miyamoto, K [1 ]
Hoshimiya, T [1 ]
机构
[1] Tohoku Gakuin Univ, Tagajo, Miyagi 9858537, Japan
来源
OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN'99) | 1999年 / 3740卷
关键词
photoacoustic; microscopy; NDE; imaging; multi-function; surface defect;
D O I
10.1117/12.347748
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A photoacoustic microscope (PAM) with a multi-function is designed and fabricated. Two scanning modes with galvanometric scanners and linear-motor stages, which present quiet environment suitable for gas-microphone photoacoustics, are available in this microscope. Beam scanning, data acquisition, and signal processing is controlled by a graphical software LabView. Applications to the PAM to nondestructive evaluation of surface and undersurface defects of the solid specimens are also demonstrated.
引用
收藏
页码:578 / 581
页数:4
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