Electrochemical quartz crystal microbalance study of Si electrodeposition in ionic liquid

被引：30
作者：
Komadina, J. [1 ,2 ]
Akiyoshi, T. [1 ]
Ishibashi, Y. [1 ]
Fukunaka, Y. [2 ,3 ,4 ]
Homma, T. [1 ,2 ]
机构：
[1] Waseda Univ, Dept Appl Chem, Shinjuku Ku, Tokyo 1698555, Japan
[2] JST CREST, Shinjuku Ku, Tokyo 1698555, Japan
[3] Waseda Univ, Nanotechnol Res Ctr, Shinjuku Ku, Tokyo 1698555, Japan
[4] Japan Aerosp Explorat Agcy JAXA, Tsukuba, Ibaraki 3058505, Japan
来源：
ELECTROCHIMICA ACTA | 2013年 / 100卷
基金：
日本学术振兴会;
关键词：
Ionic liquid; Silicon electrodeposition; EQCM; EQCM; STM; FILMS;
D O I：
10.1016/j.electacta.2012.07.043
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
The electrodeposition of silicon from silicon tetrachloride in the hydrophobic room temperature ionic liquid trimethyl-n-hexyl ammonium bis-(trifluoromethylsulfonyl) imide was investigated by cyclic voltammetry and chronoamperometry. In situ electrochemical quartz crystal microbalance (EQCM) impedance spectroscopy was used to estimate the mass of films during deposition. The charge efficiency estimated from EQCM measurements is similar to 190-250% for four-electron silicon reduction. However, compositional analysis by XPS shows that the EQCM current efficiency estimates are artificially high due to ionic liquid inclusion in the films. Taking the mass concentration of impurities into account, the bestcase estimate of current efficiency is found to be approximately 130% for constant potential deposition, suggesting silicon may not have been completely reduced at the potentials investigated, or a chemical reaction step occurs. We also consider that the EQCM analysis may include too many deviations from assumptions for accurate estimation of mass with the conditions studied. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：236 / 241
页数：6
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