Batch fabrication of micro-coils for MR spectroscopy on silicon

被引：0

作者：

Syms, RRA ^{[1
]}

Ahmad, MM ^{[1
]}

Young, IR ^{[1
]}

Gilderdale, D ^{[1
]}

Collins, DJ ^{[1
]}

Leach, MO ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, EEE Dept, London SW7 2AZ, England

来源：

2005 IEEE SENSORS, VOLS 1 AND 2 | 2005年

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A process for batch fabrication of low-cost microcoils for magnetic resonance (MR) spectroscopy of clinical biopsy samples is demonstrated. Conductors are fabricated on oxidized, intrinsic silicon substrates by electroplating metals inside a deep photoresist mould. Through-wafer deep reactive ion etching (DRIE) is used to define precise sample volumes and stencil cuts around each die, and dies are separated by snap-out. Single- and multiple-coil (Helm holtz-type) sensors are formed, by stacking parts on silicon baseplates. MR imaging and spectroscopy are both demonstrated on model samples, with high SNR.

引用

页码：227 / 230

页数：4

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