Amorphous boron coatings produced with vacuum arc deposition technology

被引:48
作者
Klepper, CC [1 ]
Hazelton, RC
Yadlowsky, EJ
Carlson, EP
Keitz, MD
Williams, JM
Zuhr, RA
Poker, DB
机构
[1] HY Tech Res Corp, Radford, VA 24141 USA
[2] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2002年 / 20卷 / 03期
关键词
D O I
10.1116/1.1464844
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In principle, boron (B) as a material has many excellent surface properties, including corrosion resistance, very high hardness, refractory properties, and a strong tendency to bond with most substrates. The potential technological benefits of the material have not been realized, because it is difficult to deposit it as coatings. B is difficult to evaporate, does not sputter well, and cannot be thermally sprayed. In this article, first successful deposition results from a robust system, based on the vacuum (cathodic) are technology, are reported. Adherent coatings have been produced on 1100 Al, CP-Ti, Ti-6Al-4V, 316 SS, hard chrome plate, and 52 100 steel. Composition and thickness analyses have been performed by Rutherford backscattering spectroscopy. Hardness (H) and modules (E) have been evaluated by nanoindentation. The coatings are very pure and have properties characteristic of B suboxides. A microhardness of up to 27 GPa has been measured on a 400-nm-thick film deposited on 52 100 steel, with a corresponding modulus of 180 GPa. This gives a very high value for the HIE ratio, a figure-of-merit for impact resistance of the film. A number of applications are contemplated. including corrosion/abrasion protection for die-casting dies and improved wear resistance for biomedical implants. (C) 2002 American Vacuum Society.
引用
收藏
页码:725 / 732
页数:8
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