Optical properties of (Mn, Co) co-doped ZnO films prepared by dual-radio frequency magnetron sputtering

被引：27

作者：

Gu, Zheng-bin

Lu, Ming-hui

Wang, Jing

Du, Chao-ling

Yuan, Chang-sheng

Wu, Di

Zhang, Shan-tao

Zhu, Yong-yuan

Zhu, Shi-ning

Chen, Yan-feng ^{[1
]}

机构：

[1] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China

[2] Nanjing Univ, Dept Mat Sci & Engn, Nanjing 210093, Peoples R China

来源：

THIN SOLID FILMS | 2006年 / 515卷 / 04期

关键词：

sputtering; zinc oxide; doped II-VI semiconductor; optical properties;

D O I：

10.1016/j.tsf.2006.04.030

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Dual-radio frequency magnetron sputtering was employed to prepare (Mn, Co) co-doped ZnO films on sapphire (0001). X-ray diffraction and X-ray photoelectron spectroscopy results indicate that the films are highly c-axis oriented and the doped Mn and Co ions in films are both in the divalent states. A dominant photoluminescence peak was observed at the wavelength of 405 nm. Ultraviolet-Visible absorption spectra show band gaps of 2.80, 2.90, 3.27, and 3.22 eV for (Mn-0.02, Co-0.04) Zn0.94O, Zn0.90Co0.10, Zn0.97Mn0.03O and ZnO films, respectively. A red-shift more than 500 meV was observed in a (Mn, Co) co-doped ZnO film. The Raman spectra measurement of (Mn, Co)ZnO films revealed additional vibrational modes at 276.6, 525.6, 634.6, and 643.9 cm(-1) compared to the host phonons of ZnO. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：2361 / 2365

页数：5

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