Enhancement of p-type conductivity by modifying the internal electric field in Mg- and Si-δ-codoped AlxGa1-xN/AlyGa1-yN superlattices

被引:24
作者
Li, Jinchai [1 ]
Yang, Weihuang [1 ]
Li, Shuping [1 ]
Chen, Hangyang [1 ]
Liu, Dayi [1 ]
Kang, Junyong [1 ]
机构
[1] Xiamen Univ, Dept Phys, Fujian Key Lab Semicond Mat & Applicat, Mat & Devices State Educ Minist, Xiamen 361005, Peoples R China
关键词
LIGHT-EMITTING-DIODES; ALGAN; ALXGA1-XN;
D O I
10.1063/1.3248026
中图分类号
O59 [应用物理学];
学科分类号
摘要
The internal electric field is modified by using Mg-and Si-delta-codoped AlxGa1-xN/AlyGa1-yN superlattices (SLs). The first-principles simulation results show that the internal electric field in SL has been significantly intensified due to the charge transferring from Si-doped interface to Mg-doped interface. Accordingly, the Mg- and Si-delta-codoped p-type Al0.2Ga0.8N/GaN SLs are grown by metalorganic vapor phase epitaxy and higher hole concentration as much as twice of that in modulation-doped SL has been achieved, as determined by Hall effect measurements. Furthermore, by applying Mg- and Si-delta-codoped AlxGa1-xN/AlyGa1-yN SLs with high Al content as the p-type layers, we have fabricated deep ultraviolet light emitting diodes with superior current-voltage characteristics by lowering Mg-acceptor activation energy. (C) 2009 American Institute of Physics. [doi:10.1063/1.3248026]
引用
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页数:3
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