Electro-optic integration of embedded electrodes and waveguides in LiNbO3 using a femtosecond laser

被引：82

作者：

Liao, Yang ^{[1
]}

Xu, Jian ^{[1
]}

Cheng, Ya ^{[1
]}

Zhou, Zhenghui ^{[1
]}

He, Fei ^{[1
]}

Sun, Haiyi ^{[1
]}

Song, Juan ^{[1
]}

Wang, Xinshun ^{[1
]}

Xu, Zhizhan ^{[1
]}

Sugioka, Koji ^{[2
]}

Midorikawa, Katsumi ^{[2
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] RIKEN, Inst Phys & Chem Res, Laser Technol Lab, Wako, Saitama 3510198, Japan

来源：

OPTICS LETTERS | 2008年 / 33卷 / 19期

关键词：

D O I：

10.1364/OL.33.002281

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe the fabrication of a Mach-Zehnder optical modulator in LiNbO3 by femtosecond laser micormachining, which is composed of optical waveguides inscripted by a femtosecond laser and embedded microelectrodes subsequently using femtosecond laser ablation and selective electroless plating. A half-wave voltage close to 19 V is achieved at a wavelength of 632.8 nm with an interaction length of 2.6 mm. This simple and cost-effective technique opens up new opportunities for fabricating integrated electro-optic devices. (C) 2008 Optical Society of America

引用

页码：2281 / 2283

页数：3

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