共 45 条
- [1] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3
- [2] Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing [J]. MICROFLUIDIC DEVICES AND SYSTEMS, 1998, 3515 : 177 - 182
- [3] Becker H., 1999, P NOV MICR OPT BIOME
- [4] Becker H., 1999, IEEE, V228
- [5] Precision manufacture of optical disc master stampers [J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1997, 20 (01): : 53 - 62
- [6] Byrce D.M., 1996, PLASTIC INJECTION MO
- [8] Embossing of nanoscale features and environments [J]. MICROELECTRONIC ENGINEERING, 1997, 35 (1-4) : 393 - 396
- [10] Despont M., 1997, IEEE MEMS