Fabrication and reliability study of a double spiral platinum-based MEMS hotplate

被引：12
作者：
Prasad, Mahanth [1 ,2 ]
Arya, Dhairya [3 ]
Khanna, Vinod [1 ,2 ]
机构：
[1] Cent Elect Engn Res Inst, CSIR, MEMS, Pilani 333031, Rajasthan, India
[2] Cent Elect Engn Res Inst, CSIR, Microsensors Grp, Pilani 333031, Rajasthan, India
[3] Kurukshetra Univ, Dept Elect & Commun Engn, Kurukshetra 136119, Haryana, India
来源：
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2015年 / 14卷 / 02期
关键词：
platinum; double spiral; microheater; reliability; GAS; SENSOR; MICROHOTPLATE; MICROHEATER;
D O I：
10.1117/1.JMM.14.2.025003
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A MEMS hotplate consisting of a double spiral platinum-based element was designed and simulated using MEMS-CAD tool COVENTORWARE. A platinum resistor of 115 Omega was fabricated on a 0.6 mu m-thick SiO2 membrane of size 120 mu m x 120 mu m. The hotplate consumes 54 mW when heated up to 756 degrees C. The temperature coefficient of resistance of platinum was measured and found to be 2.19 x 10(-3)/degrees C. The fabrication and reliability testing of the hotplate are described. The test results show that the hotplate can continuously operate at 580 degrees C for 5.5 h and it can sustain at least 60 cycles of pulse-mode operation at 530 degrees C with very low temperature and resistance drifts. The maximum current capability of the hotplate was found to be 13.4 mA without any damage to the structure. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
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页数：9
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