Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

被引:0
|
作者
Wu, Dong [1 ]
Zhu, Si [1 ]
Xu, Jian [1 ]
Sugioka, Koji [1 ]
Midorikawa, Katsumi [1 ]
机构
[1] RIKEN, Adv Sci Inst, Laser technol Lab, Wako, Saitama 3510198, Japan
关键词
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We propose a novel strategy which fuses femtosecond laser TPP and FLAE to integrate 3D complex polymer microdevices into glass-based microfluidic devices for highly functional applications. 3D microfilters were fabricated, showing excellent filtering functions.
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页数:2
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