Low temperature growth of carbon nanotubes on printing electrodes by MPCVD

被引:9
作者
Chen, KC [1 ]
Chen, CF
Chiang, JS
Hwang, CL
Chang, YY
Lee, CC
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan
[2] Ind Technol Res Inst, UCL, Hsinchu 310, Taiwan
[3] Ind Technol Res Inst, ERSO, Hsinchu 310, Taiwan
关键词
carbon nanotubes; glass substrates; MPCVD; screen printing;
D O I
10.1016/j.tsf.2005.07.085
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work, combination of screen-printing process and microwave plasma enhanced chemical vapor deposition system (MPCVD) was applied to fabricate patterned carbon nanotubes (CNTs) on the cathode electrodes on glass substrates. Solution based Ni catalyst was well-mixed with Ag powders and organic binder materials to forin screen printed paste. CNTs were then grown under the atmosphere Of CH4/H-2 gas mixture below 550 degrees C. In the field emission measurement, the tum-on field was 3.2 V/mu m and uniform electron emission image was also observed. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:198 / 201
页数:4
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