Small current collapse in AlGaN/GaN HFETs on a-plane GaN self-standing substrate

被引:2
作者
Sugiyama, T. [1 ]
Honda, Y. [1 ]
Yamaguchi, M. [1 ]
Amano, H. [1 ,3 ]
Isobe, Y. [2 ]
Iwaya, M. [2 ]
Takeuchi, T. [2 ]
Kamiyama, S. [2 ]
Akasaki, I. [2 ,3 ]
Imade, M. [4 ]
Kitaoka, Y. [4 ]
Mori, Y. [4 ]
机构
[1] Nagoya Univ, Grad Sch Engn, Chikusa Ku, C3-1 Furo Cho, Nagoya, Aichi 4648603, Japan
[2] Meijo Univ, Fac Sci & Technol, Nagoya, Aichi 4688502, Japan
[3] Nagoya Univ, Akasaki Res Ctr, Nagoya, Aichi 4648603, Japan
[4] Osaka Univ, Grad Sch Elect Engn, Suita, Osaka 5650871, Japan
来源
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 3-4 | 2012年 / 9卷 / 3-4期
关键词
GaN; AlGaN/GaN; HFET; nonpolar; a-plane; current collapse;
D O I
10.1002/pssc.201100397
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We measured drain bias stress effects and current collapse in AlGaN/GaN heterostructure field-effect transistors (HFETs) on a-plane and c-plane GaN substrates. An a-plane AlGaN/GaN HFET (a-HFET) shows small current collapse with a threshold voltage (V-th=-1.8 V). On the other hand, a c-plane HFET (c-HFET) with the same barrier thickness (20 nm) shows a small current collapse, although V-th was negatively large (V-th=-4 V). Current collapse in a-HFET was not large compared with that in conventional c-HFET on GaN. A c-HFET on sapphire was also measured. The current collapses in HFETs on sapphire were larger than that in HFETs on a GaN substrate. The current collapses in the thin-barrier c-HFET (Vth=-1.8 V) were particularly large. Therefore, an a-plane device is promising for a small or positive Vth with small current collapse. (C) 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:875 / 878
页数:4
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