Two-dimensional in situ metrology of X-ray mirrors using the speckle scanning technique

被引：18

作者：

Wang, Hongchang ^{[1
]}

Kashyap, Yogesh ^{[1
]}

Laundy, David ^{[1
]}

Sawhney, Kawal ^{[1
]}

机构：

[1] Diamond Light Source Ltd, Didcot OX11 0DE, Oxon, England

来源：

JOURNAL OF SYNCHROTRON RADIATION | 2015年 / 22卷

关键词：

speckle; X-ray optics; metrology; WAVE-FRONT CHARACTERIZATION; GRATING INTERFEROMETRY; BEAMLINE; OPTICS;

D O I：

10.1107/S1600577515006657

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In situ metrology overcomes many of the limitations of existing metrology techniques and is capable of exceeding the performance of present-day optics. A novel technique for precisely characterizing an X-ray bimorph mirror and deducing its two-dimensional (2D) slope error map is presented. This technique has also been used to perform fast optimization of a bimorph mirror using the derived 2D piezo response functions. The measured focused beam size was significantly reduced after the optimization, and the slope error map was then verified by using geometrical optics to simulate the focused beam profile. This proposed technique is expected to be valuable for in situ metrology of X-ray mirrors at synchrotron radiation facilities and in astronomical telescopes.

引用

页码：925 / 929

页数：5

共 21 条

[1] Probing the Transverse Coherence of an Undulator X-Ray Beam Using Brownian Particles [J].

Alaimo, M. D. ;

Potenza, M. A. C. ;

Manfredda, M. ;

Geloni, G. ;

Sztucki, M. ;

Narayanan, T. ;

Giglio, M. .

PHYSICAL REVIEW LETTERS, 2009, 103 (19)

[2] The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability [J].

Alcock, S. G. ;

Sawhney, K. J. S. ;

Scott, S. ;

Pedersen, U. ;

Walton, R. ;

Siewert, F. ;

Zeschke, T. ;

Senf, F. ;

Noll, T. ;

Lammert, H. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 616 (2-3) :224-228

[3] Active X-ray optics for the next generation of X-ray telescopes [J].

Atkins, Carolyn ;

Wang, Hongchang ;

Doel, Peter ;

Brooks, David ;

Thompson, Samantha ;

Feldman, Charlotte ;

Willingale, Richard ;

Button, Tim ;

Sanmartin, Daniel Rodriguez ;

Zhang, Dou ;

James, Ady ;

Theobald, Craig ;

Willis, Graham ;

Smith, Andrew D. .

EUV AND X-RAY OPTICS: SYNERGY BETWEEN LABORATORY AND SPACE, 2009, 7360

[4] At-wavelength metrology of hard X-ray mirror using near field speckle [J].

Berujon, Sebastien ;

Wang, Hongchang ;

Alcock, Simon ;

Sawhney, Kawal .

OPTICS EXPRESS, 2014, 22 (06) :6438-6446

[5] X-ray phase microscopy using the speckle tracking technique [J].

Berujon, Sebastien ;

Wang, Hongchang ;

Pape, Ian ;

Sawhney, Kawal .

APPLIED PHYSICS LETTERS, 2013, 102 (15)

[6] X-ray multimodal imaging using a random-phase object [J].

Berujon, Sebastien ;

Wang, Hongchang ;

Sawhney, Kawal .

PHYSICAL REVIEW A, 2012, 86 (06)

[7] Two-Dimensional X-Ray Beam Phase Sensing [J].

Berujon, Sebastien ;

Ziegler, Eric ;

Cerbino, Roberto ;

Peverini, Luca .

PHYSICAL REVIEW LETTERS, 2012, 108 (15)

[8] EFFECTS OF SURFACE-SCATTER ON THE OPTICAL-PERFORMANCE OF X-RAY SYNCHROTRON BEAM-LINE MIRRORS [J].

HARVEY, JE ;

LEWOTSKY, KL ;

KOTHA, A .

APPLIED OPTICS, 1995, 34 (16) :3024-3032

[9] Incoherent X-ray mirror surface metrology [J].

Hignette, O ;

Freund, A ;

Chinchio, E .

MATERIALS, MANUFACTURING, AND MEASUREMENT FOR SYNCHROTRON RADIATION MIRRORS, 1997, 3152 :188-199

[10] X-ray active mirror coupled with a Hartmann wavefront sensor [J].

Idir, Mourad ;

Mercere, Pascal ;

Modi, Mohammed H. ;

Dovillaire, Guillaume ;

Levecq, Xavier ;

Bucourt, Samuel ;

Escolano, Lionel ;

Sauvageot, Paul .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 616 (2-3) :162-171

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