Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition

被引：15

作者：

Guo, Chun ^{[1
,2
]}

Kong, Mingdong ^{[1
]}

Lin, Dawei ^{[1
]}

Liu, Cunding ^{[1
]}

Li, Bincheng ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China

[2] Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 01期

关键词：

THIN-FILMS; EVAPORATION;

D O I：

10.1364/OE.21.000960

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth. (C) 2013 Optical Society of America

引用

页码：960 / 967

页数：8

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