Liquid phase epitaxial growth and characterization of In(Sb,Bi)

被引:3
作者
Raczynska, J [1 ]
Rogalski, A [1 ]
Rutkowski, J [1 ]
Fronc, K [1 ]
机构
[1] Mil Univ Technol, Inst Appl Phys, PL-00908 Warsaw, Poland
来源
EPILAYERS AND HETEROSTRUCTURES IN OPTOELECTRONICS AND SEMICONDUCTOR TECHNOLOGY | 1999年 / 3725卷
关键词
InBiSb; LPE; doping; epitaxial layers; bismuth solution;
D O I
10.1117/12.344708
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The growth of In(Bi,Sb) epilayers using liquid phase epitaxy (LPE) has been discussed. The layers were grown on a (III)B side of InSb substrate using Bi-rich solution in horizontal slider type boat. The growth conditions for high-quality planar epitaxial layers were determined. Mirrorlike surface morphology was observed using a Normarski differential interference contrast microscope. Hall and resistivity measurements performed at 300K and 77K showed an impurity contamination of the epitaxial layers. A capacitance-voltage technique has been established to determine the distribution of doping levels on the surface of InBiSb epilayers. The results indicate that the epitaxial layers of In(Sb,Bi) are n-type at room temperature, however, the time of baking solutions (before crystallisation) determined type of conductivity and the concentration of free carriers in epilayers, at 77K. For short-time-baked solution (from 5 to 20 hours), samples were p-type (carrier concentration approximately 3.10(15) cm(-3)) when for long- time-baked solutions (40-100 hours), samples were n-type (carrier concentration approximately 5.10(15) cm(-3)). We have observed that type of conductivity depends on surface morphology of the epilayers. The type of doping and the segregation coefficient k for tin for different solutions were established. For In rich solutions tin was an acceptor with k=0.0012 and for Bi-rich ones tin was a donor with k=0.0039 at 400 degrees C.
引用
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页码:66 / 71
页数:6
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