Optical and structural characterization of SnO2:F/SiCxOy tandem thin films by spectroscopic ellipsometry

被引：7
作者：
Wang, Kangkai [1 ,2 ]
Hua, Yuefang [3 ]
Wang, Ju [1 ,2 ]
Song, Chenlu [1 ,2 ]
Jia, Shaohui [4 ]
Han, Gaorong [1 ,2 ]
Liu, Yong [1 ,2 ]
机构：
[1] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
[2] Zhejiang Univ, Dept Mat Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China
[3] Zhejiang Univ Technol, Coll Chem Engn & Mat Sci, Hangzhou 310014, Zhejiang, Peoples R China
[4] Weihai Blue Star Glass Holding Co Ltd, Weihai 264205, Peoples R China
来源：
THIN SOLID FILMS | 2013年 / 540卷
基金：
中国国家自然科学基金;
关键词：
Low-emissivity; Fluoride-doped tin oxide; Multilayer film; Spectroscopic ellipsometry; Surface morphology; COATINGS;
D O I：
10.1016/j.tsf.2013.06.031
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A five-layer model for low-emissivity (Low-E) coated glass with SnO2:F/SiCxOy tandem thin films has been developed for spectroscopic ellipsometry (SE) measurement. A comprehensive interpretation of this structure model is also presented. The theoretical, optical, and structural parameters obtained by fitting the SE experimental data have been proven credible using other auxiliary measurements, including spectrophotometry, atomic force microscopy, scanning electronic microscopy and transmission electronic microscopy. The effect of the diffusing sodium ions on the optical and electronic properties of the film is also discussed. These results demonstrate that SE, accompanied with this five-layer model, is helpful for an on-line characterization of the Low-E coating process used as a non-destructive and low time-consuming method. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：84 / 91
页数：8
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