Subvolt turn-on voltage self-align gate diamond emitter fabricated by self-align-gate-sharpened molding technique

被引：12
作者：
Kang, WP
Wisitsora-at, A
Davidson, JL
Howell, M
Kerns, DV
Li, Q
Xu, F
机构：
[1] Vanderbilt Univ, Dept Elect & Comp Engn, Nashville, TN 37235 USA
[2] E China Normal Univ, Dept Elect Sci & Technol, Shanghai 200062, Peoples R China
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 02期
关键词：
D O I：
10.1116/1.590631
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A diamond field emitter diode array with subvolt turn-on voltage and high emission current is reported. The diamond field emitter diode array with self-align anode was fabricated using a new self-ali,on technique, "self-align-gate-sharpened molding." The emission current vs anode voltage of the self-align diamond emitter diode shows an extremely low turn-on voltage of 0.7 V, one of the lowest values reported in the field emission literatures. A high emission current of 4 mu A at an anode voltage of less than 5 V can be obtained from a 2 X 2 array of diamond tips. The turn-on voltage is comparable to conventional p-n:junction diode. (C) 1999 American Vacuum Society. [S0734-211X(99)03402-2].
引用
收藏
页码：740 / 743
页数：4
相关论文
共 20 条
[1]   FIELD-EMISSION FROM ION-MILLED DIAMOND FILMS ON SI [J].
ASANO, T ;
OOBUCHI, Y ;
KATSUMATA, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02) :431-434
[2]   Field emission properties of diamond films of different qualities [J].
Fox, NA ;
Wang, WN ;
Davis, TJ ;
Steeds, JW ;
May, PW .
APPLIED PHYSICS LETTERS, 1997, 71 (16) :2337-2339
[3]  
Givargizov E. I., 1994, Physics-Doklady, V39, P766
[4]   SILICON TIPS WITH DIAMOND PARTICLES ON THEM - NEW FIELD EMITTERS [J].
GIVARGIZOV, EI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02) :414-417
[5]  
HIRANO T, 1996, UNPUB IEDM 96 SAN FR
[6]   The role of atomic hydrogen and its influence on the enhancement of secondary electron emission from C(001) surfaces [J].
Humphreys, TP ;
Thomas, RE ;
Malta, DP ;
Posthill, JB ;
Mantini, MJ ;
Rudder, RA ;
Hudson, GC ;
Markunas, RJ ;
Pettenkofer, C .
APPLIED PHYSICS LETTERS, 1997, 70 (10) :1257-1259
[7]   Physical characterization of diamond pyramidal microtip emitters [J].
Kang, WP ;
Davidson, JL ;
George, MA ;
Milosavljevic, I ;
Li, Q ;
Xu, JF ;
Kerns, DV .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (02) :460-463
[8]   Effect of sp2 content and tip treatment an the field emission of micropatterned pyramidal diamond tips [J].
Kang, WP ;
Wisitsora-at, A ;
Davidson, JL ;
Kerns, DV ;
Li, Q ;
Xu, JF ;
Kim, CK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (02) :684-688
[9]   Micropattern-gated diamond field emitter array [J].
Kang, WP ;
Wisitsora-at, A ;
Davidson, JL ;
Howell, M ;
Kerns, DV ;
Li, Q ;
Xu, JF ;
Kim, CK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (02) :732-735
[10]   Micropatterned polycrystalline diamond field emitter vacuum diode arrays [J].
Kang, WP ;
Davidson, JL ;
Howell, M ;
Bhuva, B ;
Kinser, DL ;
Kerns, DV ;
Li, Q ;
Xu, JF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03) :2068-2071
12