Decreasing of the thermal conductivity of Si nanopillar/SiGe composite films investigated by using a piezoelectric photothermal spectroscopy

被引:3
作者
Harada, Tomoki [1 ]
Aki, Tsubasa [1 ]
Ohori, Daisuke [2 ]
Samukawa, Seiji [2 ,3 ]
Ikari, Tetsuo [1 ]
Fukuyama, Atsuhiko [1 ]
机构
[1] Univ Miyazaki, 1-1 Gakuen Kibanadainishi, Miyazaki, Miyazaki 8892192, Japan
[2] Tohoku Univ, Inst Fluid Sci, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan
[3] Tohoku Univ, Adv Inst Mat Res, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan
基金
日本学术振兴会;
关键词
THERMOELECTRIC PERFORMANCE; SILICON; TRANSPORT;
D O I
10.35848/1347-4065/ab82a6
中图分类号
O59 [应用物理学];
学科分类号
摘要
To investigate the decrease of thermal conductivity (kappa) of nanoscale Si materials, we conducted the piezoelectric photothermal (PPT) method for the highly periodic Si nanopillar arrays embedded in Si0.7Ge0.3. The PPT is an electrode free method that can measure a heat propagation in the parallel to the nanopillars direction. A distinctive dip was observed in the frequency-dependent PPT signal intensity. By focusing the dip frequency, kappa was estimated from the comparison with the model analysis based on the one-dimensional multilayer thermal diffusion equation. The estimated kappa was 0.19 +/- 0.07 W m(-1) K, in the parallel to the nanopillars direction. Since the considerable decrease of kappa was confirmed from the non-radiative recombination point of view, we found the present non-destructive PPT method is very useful to estimate kappa in the nanostructured devices for the thermoelectric application. (C) 2020 The Japan Society of Applied Physics
引用
收藏
页数:5
相关论文
共 38 条
[11]   EFFECT OF QUANTUM-WELL STRUCTURES ON THE THERMOELECTRIC FIGURE OF MERIT [J].
HICKS, LD ;
DRESSELHAUS, MS .
PHYSICAL REVIEW B, 1993, 47 (19) :12727-12731
[12]   Enhanced thermoelectric performance of rough silicon nanowires [J].
Hochbaum, Allon I. ;
Chen, Renkun ;
Delgado, Raul Diaz ;
Liang, Wenjie ;
Garnett, Erik C. ;
Najarian, Mark ;
Majumdar, Arun ;
Yang, Peidong .
NATURE, 2008, 451 (7175) :163-U5
[13]   DETERMINATION OF MATERIAL THERMAL-PROPERTIES USING PHOTOACOUSTIC SIGNALS DETECTED BY A TRANSPARENT TRANSDUCER [J].
HORITA, S ;
KONISHI, H ;
MIYABO, N ;
HATA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (5B) :3238-3245
[14]   Thermal conductivity of Si/SiGe and SiGe/SiGe superlattices [J].
Huxtable, ST ;
Abramson, AR ;
Tien, CL ;
Majumdar, A ;
LaBounty, C ;
Fan, X ;
Zeng, GH ;
Bowers, JE ;
Shakouri, A ;
Croke, ET .
APPLIED PHYSICS LETTERS, 2002, 80 (10) :1737-1739
[15]  
Ikari T., 2000, Progress in Photothermal and Photoacoustic Science and Technology, Semiconductors and Electronic Materials, P145
[16]   PIEZOELECTRIC PHOTOACOUSTIC DETECTION - THEORY AND EXPERIMENT [J].
JACKSON, W ;
AMER, NM .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) :3343-3353
[17]   Thermal conductivity measurement of thermally-oxidized SiO2 films on a silicon wafer using a thermo-reflectance technique [J].
Kato, R ;
Hatta, I .
INTERNATIONAL JOURNAL OF THERMOPHYSICS, 2005, 26 (01) :179-190
[18]   Comparative study of absorption in tilted silicon nanowire arrays for photovoltaics [J].
Kayes, Md Imrul ;
Leu, Paul W. .
NANOSCALE RESEARCH LETTERS, 2014, 9
[19]   Composite films of highly ordered Si nanowires embedded in SiGe0.3 for thermoelectric applications [J].
Kikuchi, Akiou ;
Yao, Akifumi ;
Mori, Isamu ;
Ono, Takahito ;
Samukawa, Seiji .
JOURNAL OF APPLIED PHYSICS, 2017, 122 (16)
[20]   Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon nanowires array [J].
Kikuchi, Akiou ;
Yao, Akifumi ;
Mori, Isamu ;
Ono, Takahito ;
Samukawa, Seiji .
APPLIED PHYSICS LETTERS, 2017, 110 (09)