High precision small angle generator for realization of the SI unit of plane angle and calibration of high precision autocollimators

被引:28
作者
Yandayan, Tanfer [1 ]
Ozgur, Bulent [1 ]
Karaboce, Nuray [1 ]
Yaman, Orhan [1 ]
机构
[1] TUBITAK UME, TR-41470 Gebze, Turkey
关键词
SI units; traceability; small angle generator; angle calibration; autocollimators; NONINTEGER SUBDIVISION; INDEXING TABLE; POLYGON ANGLES; SYSTEM; COMPARATOR;
D O I
10.1088/0957-0233/23/9/094006
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A highly precise small angle generator (HPSAG) has been developed in UME to realize the SI unit of plane angle, radian (rad), more precisely and calibrate high precision autocollimators. The device can easily generate small angles in measurement steps of 0.001 arcsec in the measurement range of +/- 8 arcsec. This enables calibration of high-resolution electronic autocollimators in very small measurement steps close to the autocollimators' resolution with an expanded uncertainty of 0.01 arcsec (k = 2). Description of the device, method, uncertainty budget and the first results are reported.
引用
收藏
页数:12
相关论文
共 26 条
[1]   The new INRiM nanoangle generator [J].
Astrua, M. ;
Pisani, M. .
METROLOGIA, 2009, 46 (06) :674-681
[2]  
bipm, SI BROCH
[3]   Uncertainty analysis for angle calibrations using circle closure [J].
Estler, WT .
JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1998, 103 (02) :141-151
[4]  
Estler WT, 1993, CIRP ANN-MANUF TECHN, V42, P573
[5]  
Evans JC, 1986, NATL PHYS LAB NOTES
[6]   Use and traceable calibration of autocollimators for ultra-precise measurement of slope and topography [J].
Geckeler, R ;
Weingärtner, I ;
Just, A ;
Probst, R .
RECENT DEVELOPMENTS IN TRACEABLE DIMENSIONAL MEASUREMENTS, 2001, 4401 :184-195
[7]  
Geckeler R D, 2009, ANGLE COMP USING AUT
[8]   Optimized use and calibration of autocollimators in deflectometry - art. no. 670407 [J].
Geckeler, Ralf D. ;
Just, Andreas .
ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS II, 2007, 6704 :70407-70407
[9]   Autocollimators for deflectometry: Current status and future progress [J].
Geckeler, Ralf D. ;
Just, Andreas ;
Krause, Michael ;
Yashchuk, Valeriy V. .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 616 (2-3) :140-146
[10]   Distance-dependent influences on angle metrology with autocollimators in deflectometry [J].
Geckeler, Ralf D. ;
Just, Andreas .
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS III, 2008, 7077