Performance of metal Hall sensors based on copper

被引：13

作者：

Sentkerestiova, Jana ^{[1
]}

Duran, Ivan ^{[2
]}

Kovarik, Karel ^{[2
,3
]}

Viererbl, Ladislav ^{[4
]}

Kohout, Michal ^{[5
]}

机构：

[1] Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague, Czech Republic

[2] Assoc EURATOM IPP CR, Vvi, Inst Plasma Phys AS CR, Prague, Czech Republic

[3] Charles Univ Prague, Fac Math & Phys, Prague, Czech Republic

[4] Res Ctr Rez, Rez, Czech Republic

[5] Inst Phys AS CR, Vvi, Prague, Czech Republic

来源：

FUSION ENGINEERING AND DESIGN | 2013年 / 88卷 / 6-8期

关键词：

Metal Hall sensor; Magnetic diagnostics; Copper Hall sensor; Fusion reactors; Neutron irradiation; REACTOR IRRADIATION; RADIATION; BOLOMETERS; CERAMICS;

D O I：

10.1016/j.fusengdes.2013.02.055

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

We investigated potential of metal Hall sensors based on copper for steady state magnetic measurements on future fusion reactors. Prototype sensors were designed as thin copper active layer deposited on Al2O3 Direct Bond Copper (DBC) ceramic substrates with etched 0.127 mm thick copper contact areas and ceramic adhesive encapsulation. The active layers with thickness bellow I mu m were fabricated by two alternative methods: vapour deposition and magnetron sputtering. The sensors reached the theoretically expected sensitivity values and showed repeatedly nearly no dependence of sensitivity on temperature up to 250 degrees C. We observed no effect of neutron irradiation on sensors properties up to the total neutron fluence of 10(18) cm(-2). (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：1310 / 1314

页数：5

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