Thermal stability studies of ion beam sputter deposited C/B4C X-ray multilayer mirror

被引：5

作者：

Rao, P. N. ^{[1
]}

Modi, M. H. ^{[1
]}

Rai, S. K. ^{[1
]}

Sathe, V. G. ^{[2
]}

Deb, S. K. ^{[1
]}

Lodha, G. S. ^{[1
]}

机构：

[1] Raja Ramanna Ctr Adv Technol, Ind Synchrotrons Utilizat Div, Xray Opt Sect, Indore 452013, Madhya Pradesh, India

[2] UGC DAE Consortium Sci Res, Indore 452001, Madhya Pradesh, India

来源：

THIN SOLID FILMS | 2013年 / 527卷

关键词：

X-ray multilayer; Thermal stability; Soft X-ray reflectivity; Raman spectroscopy; X-ray optics; Synchrotron radiation; INDUCED STRUCTURAL MODIFICATION; EXTREME-ULTRAVIOLET; PHOTOABSORPTION; METAL/AL2O3; REFLECTION; SCATTERING; OPTICS; FILMS; OXIDE;

D O I：

10.1016/j.tsf.2012.12.033

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report the results of thermal stability study carried out on C/B4C multilayer structure. We have analyzed the structure of as-deposited and vacuum annealed C/B4C multilayer film by soft X-ray reflectivity measurements. We observed that multilayer period expansion continues till 600 degrees C and slight contraction at higher annealing temperature. The results show that the multilayer structure is stable even after 700 degrees C annealing. Raman spectroscopy indicates graphitization of carbon layerwith increasing annealing temperature. Graphitization of carbon results in increases of layer thickness and decreases in density as also observed by soft X-ray reflectivity. We observed reduction in measured soft X-ray reflectivity at 6.56 and 4.39 nm wavelengths after 800 degrees C annealing. C/B4C multilayer structure has been tested over a period of one year to investigate its temporal stability. (C) 2012 Elsevier B. V. All rights reserved.

引用

页码：244 / 249

页数：6

共 50 条

[31] Improving the soft X-ray reflectivity of Cr/Ti multilayers by co-deposition of B4C
Zhu, Jingtao
Zhang, Jiayi
Li, Haochuan
Tu, Yuchun
Chen, Jinwen
Wang, Hongchang
Dhesi, Sarnjeet S.
Cui, Mingqi
Zhu, Jie
Jonnard, Philippe
JOURNAL OF SYNCHROTRON RADIATION, 2020, 27 : 1614 - 1617
[32] Resonant soft x-ray reflectivity of Me/B4C multilayers near the boron K edge
Ksenzov, Dmitriy
Schlemper, Christoph
Pietsch, Ullrich
APPLIED OPTICS, 2010, 49 (25) : 4767 - 4773
[33] Element-specific structural analysis of Si/B4C using resonant X-ray reflectivity
Nayak, Maheswar
Pradhan, P. C.
Lodha, G. S.
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 2015, 48 : 786 - 796
[34] Investigation of the Properties of Multilayer Mirrors Based on a Pair of Materials Mo/B4C
Shaposhnikov, R. A.
Garakhin, S. A.
Durov, K. V.
Polkovnikov, V. N.
Chkhalo, N. I.
TECHNICAL PHYSICS, 2024, 69 (06) : 1803 - 1807
[35] Effect of surface oxidation on soft x-ray optical properties of ion beam sputter deposited amorphous AlN thin film
Kiranjot
Modi, Mohammed H.
JOURNAL OF APPLIED PHYSICS, 2021, 130 (19)
[36] Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers
Zuyev, S. Yu
Pariev, D. E.
Pleshkov, R. S.
Polkovnikov, V. N.
Salashchenko, N. N.
Svechnikov, M., V
Sertsu, M. G.
Sokolov, A.
Chkhalo, N., I
Schafers, F.
JOURNAL OF SURFACE INVESTIGATION, 2019, 13 (02): : 169 - 172
[37] On the thermal stability of multilayer optics for use with high X-ray intensities
Zakharova, Margarita
Rek, Zlatko
Sarler, Bozidar
Bajt, Sasa
OPTICAL MATERIALS EXPRESS, 2024, 14 (08): : 1933 - 1948
[38] Optical properties of boron carbide near the boron K edge evaluated by soft-x-ray reflectometry from a Ru/B4C multilayer
Ksenzov, Dmitriy
Panzner, Tobias
Schlemper, Christoph
Morawe, Christian
Pietsch, Ullrich
APPLIED OPTICS, 2009, 48 (35) : 6684 - 6691
[39] Development of Soft X-Ray Multilayer Mirror at 23. 4 nm
Liu Zhen
Li Xu
Ma Yue-ying
Chen Bo
Cao Jian-lin
SPECTROSCOPY AND SPECTRAL ANALYSIS, 2011, 31 (04) : 1138 - 1141
[40] Comparative study of the X-ray reflectivity and in-depth profile of a-C, B4C and Ni coatings at 0.1-2 keV
Kozhevnikov, I. V.
Filatova, E. O.
Sokolov, A. A.
Konashuk, A. S.
Siewert, F.
Stoermer, M.
Gaudin, J.
Keitel, B.
Samoylova, L.
Sinn, H.
JOURNAL OF SYNCHROTRON RADIATION, 2015, 22 : 348 - 353

← 1 2 3 4 5 →