Test structures for non-destructive in-situ control of anodic bonding quality.

被引：0
|
作者：
Plaza, JA [1 ]
Esteve, J [1 ]
LoraTamayo, E [1 ]
机构：
[1] CSIC,CNM,BELLATERRA 08193,SPAIN
来源：
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY II | 1996年 / 2879卷
关键词：
anodic bonding; electrostatic test; non-destructive; test;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：266 / 274
页数：9
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