Superlow friction behavior of Si-doped hydrogenated amorphous carbon film in water environment

被引：66
作者：
Zhao, F. [1 ,2 ]
Li, H. X. [1 ]
Ji, L. [1 ,2 ]
Mo, Y. F. [1 ,2 ]
Quan, W. L. [1 ,2 ]
Du, W. [1 ,2 ]
Zhou, H. D. [1 ]
Chen, J. M. [1 ]
机构：
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[2] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
来源：
SURFACE & COATINGS TECHNOLOGY | 2009年 / 203卷 / 08期
基金：
中国国家自然科学基金;
关键词：
a-C:H:Si film; Superlow friction coefficient; Water environment; Tribochemical reaction; TRIBOLOGICAL PROPERTIES; SILICON-NITRIDE; WEAR BEHAVIOR; STEEL; COATINGS; SI3N4; LAYER; AIR;
D O I：
10.1016/j.surfcoat.2008.09.025
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Si-cloped hydrogenated amorphous carbon (a-C:H:Si) film was prepared using hybrid radio frequency plasma-enhanced chemical vapor deposition (R.F. PECVD) and non-balanced magnetron sputtering deposition technique. The microstructure of the film was characterized by means of Raman spectrometry, X-ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD),while its friction behavior in water environment was investigated using a ball-on-disc tribometer. Results show that the a-C:H:Si film has typical diamond-like characteristics, and Si doped with a relative atomic concentration of about 3.9% in the film mainly exists in the form of Si, SiC, and SiO2. while it shows a superlow friction coefficient of about 0.005 in water environment when sliding against Si3N4 ball. The superlow friction behavior of the hybrid diamond-like-carbon (DLC) film could be attributed to the formation of a tribochemical reaction film and boundary lubrication layer mainly consisting of colloidal silica generated from tribochemical reactions between silicides and water molecules. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：981 / 985
页数：5
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