Template-directed vapor-liquid-solid growth of silicon nanowires

The synthesis of Si nanowires in nanoporous anodic alumina membranes was demonstrated using a combination of Au electrodeposition and vapor-liquid-solid growth at 500 degreesC using SiH4 as the Si source. The average diameter of the nanowires was 200+/-54 nm which was close to the pore size distribution of the membranes. High-resolution transmission electron microscopy revealed that the nanowires consist of a crystalline Si core, oriented in the 100 or (211) growth direction, with a thin (<3 nm) native oxide coating. In this process, Au terminates both ends of the growing wires, resulting in the formation of Au-Si-Au nanowires. (C) 2002 American Vacuum Society.