Synthesis and mechanical properties of cubic boron nitride/nanodiamond composite films

被引：36

作者：

Chong, YM ^{[1
]}

Ma, KL

Leung, KM

Chan, CY

Ye, Q

Bello, I

Zhang, WJ

Lee, ST

机构：

[1] City Univ Hong Kong, Ctr Super Diamond & Adv Films, Hong Kong, Hong Kong, Peoples R China

[2] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China

来源：

CHEMICAL VAPOR DEPOSITION | 2006年 / 12卷 / 01期

关键词：

composite films; cubic boron nitride; mechanical properties; nanodiamond;

D O I：

10.1002/cvde.200506422

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Large-area cubic boron nitride/nanocrystalline diamond (cBN/ND) composite films were deposited on silicon substrates using plasma-assisted (PA) CVD processes, and a systematic study of their mechanical properties was carried out. The direct growth of cBN on ND without an amorphous and turbostratic BN interfacial layer dramatically improves the adherence of cBN films. Because of the strengthened adhesion and improved mechanical properties due to the layered structure and the smooth surface, the composite films could be used in mechanical and some device applications.

引用

页码：33 / 38

页数：6

共 53 条

[11] Origin of the 1150-cm-1 Raman mode in nanocrystalline diamond -: art. no. 121405 [J].

Ferrari, AC ;

Robertson, J .

PHYSICAL REVIEW B, 2001, 63 (12)

[12] Distinct nonequilibrium plasma chemistry of C2 affecting the synthesis of nanodiamond thin films from C2H2 (1%)/H2/Ar-rich plasmas [J].

Gordillo-Vázquez, FJ ;

Albella, JM .

JOURNAL OF APPLIED PHYSICS, 2003, 94 (09) :6085-6090

[13] DEPOSITION AND CHARACTERIZATION OF NANOCRYSTALLINE DIAMOND FILMS [J].

GRUEN, DM ;

PAN, XZ ;

KRAUSS, AR ;

LIU, SZ ;

LUO, JS ;

FOSTER, CM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04) :1491-1495

[14] Nanodiamond thin films on titanium substrates - Growth and electrochemical properties [J].

Hian, LC ;

Grehan, KJ ;

Compton, RG ;

Foord, JS ;

Marken, F .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2003, 150 (01) :E59-E65

[15] Characterization of cubic boron nitride films grown by mass separated ion beam deposition [J].

Hofsass, H ;

Ronning, C ;

Griesmeier, U ;

Gross, M ;

Reinke, S ;

Kuhr, M ;

Zweck, J ;

Fischer, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 106 (1-4) :153-158

[16] ENERGY-BAND AND PIEZOELECTRIC CALCULATIONS ON CUBIC BORON-NITRIDE [J].

HWANG, HC ;

HENKEL, JH .

PHYSICAL REVIEW B, 1978, 17 (10) :4100-4103

[17] Charged cluster model in the low pressure synthesis of diamond [J].

Hwang, NM ;

Hahn, JH ;

Yoon, DY .

JOURNAL OF CRYSTAL GROWTH, 1996, 162 (1-2) :55-68

[18] Fracture mechanisms in nanoscale layered hard thin films [J].

Karimi, A ;

Wang, Y ;

Cselle, T ;

Morstein, M .

THIN SOLID FILMS, 2002, 420 :275-280

[19] EFFECTS OF OXYGEN ON CVD DIAMOND SYNTHESIS [J].

KAWATO, T ;

KONDO, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (09) :1429-1432

[20] Mechanical and tribological properties of cBN films on silicon and tungsten carbide substrates [J].

Keunecke, M ;

Yamamoto, K ;

Bewilogua, K .

THIN SOLID FILMS, 2001, 398 :142-149

← 1 2 3 4 5 6 →