Synthesis and mechanical properties of cubic boron nitride/nanodiamond composite films

被引：36
作者：
Chong, YM [1 ]
Ma, KL
Leung, KM
Chan, CY
Ye, Q
Bello, I
Zhang, WJ
Lee, ST
机构：
[1] City Univ Hong Kong, Ctr Super Diamond & Adv Films, Hong Kong, Hong Kong, Peoples R China
[2] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
来源：
CHEMICAL VAPOR DEPOSITION | 2006年 / 12卷 / 01期
关键词：
composite films; cubic boron nitride; mechanical properties; nanodiamond;
D O I：
10.1002/cvde.200506422
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Large-area cubic boron nitride/nanocrystalline diamond (cBN/ND) composite films were deposited on silicon substrates using plasma-assisted (PA) CVD processes, and a systematic study of their mechanical properties was carried out. The direct growth of cBN on ND without an amorphous and turbostratic BN interfacial layer dramatically improves the adherence of cBN films. Because of the strengthened adhesion and improved mechanical properties due to the layered structure and the smooth surface, the composite films could be used in mechanical and some device applications.
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收藏
页码：33 / 38
页数：6
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