Three-dimensional micro-forming process of thin film metallic glass in the supercooled liquid region

被引：0

作者：

Hata, S ^{[1
]}

Liu, YD ^{[1
]}

Kato, T ^{[1
]}

Shimokohbe, A ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Tokyo 152, Japan

来源：

INITIATIVES OF PRECISION ENGINEERING AT THE BEGINNING OF A MILLENNIUM | 2001年

关键词：

MEMS; process; micro-forming; thin film; amorphous; metallic glass;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper introduces micro-forming for the three-dimensional micro structures of thin film metallic glass (TFMG). TFMG is a kind of amorphous thin film having suitable characteristics for MEMS because they are isotropic and homogeneous as well as free from defects originating from the crystal structure. Moreover TFMG soften in a certain temperature range called the supercooled liquid region, which makes it easily be formed into three-dimensional shapes. In this paper., new three-dimensional micro-forming process of TFMG in the supercooled liquid region and its application for micro actuator are reported.

引用

页码：37 / 41

页数：5