Data processing for spectrum-images: extracting information from the data mountain

被引：13

作者：

Prutton, M ^{[1
]}

Wilkinson, DK

Kenny, PG

Mountain, DL

机构：

[1] Univ York, Dept Phys, York YO1 5DD, N Yorkshire, England

[2] Univ Kent, Comp Lab, Canterbury CT2 7NF, Kent, England

[3] Univ Bradford, Dept Comp, Bradford BD7 1DP, W Yorkshire, England

来源：

APPLIED SURFACE SCIENCE | 1999年 / 144-45卷

基金：

英国工程与自然科学研究理事会;

关键词：

image processing; scanning electron microscopy; Auger electron spectroscopy; metal-semiconductor interfaces;

D O I：

10.1016/S0169-4332(98)00754-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Several analytical methods of electron, X-ray and ion microscopy are now capable of generating images containing an entire spectrum at each pixel. These spectrum-images require new software tools for visualisation, classification and analysis. This paper outlines a new method of visualisation for spectrum-images and two image classification methods that can be used to identify the phases present in the sample. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：1 / 10

页数：10

共 41 条

[1]

[Anonymous], 2001, SPRINGER SERIES INFO, DOI DOI 10.1007/978-3-642-56927-2

[2] AES AND XPS ANALYSIS OF THE INTERACTION OF TI WITH SI AND SIO2 DURING RTA [J].

BENDER, H ;

CHEN, WD ;

PORTILLO, J ;

VANDENHOVE, L ;

VANDERVORST, W .

APPLIED SURFACE SCIENCE, 1989, 38 (1-4) :37-47

[3] SEGMENTATION AND SCATTER DIAGRAM ANALYSIS OF SCANNING AUGER IMAGES - A CRITICAL COMPARISON OF RESULTS [J].

BOHMIG, SD ;

REICHL, BM .

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1993, 346 (1-3) :223-226

[4] Multivariate statistical methods for the analysis of microscope image series: applications in materials science [J].

Bonnet, N .

JOURNAL OF MICROSCOPY, 1998, 190 :2-18

[5]

BONNET N, 1995, ULTRAMICROSCOPY, V57, P19

[6]

BRIGHT DS, 1988, MICROBEAM ANAL, P18

[7]

BRIGHT DS, 1992, MICROSCOPY KEY RES T, V22, P21

[8] NEW METHODS FOR IMAGE COLLECTION AND ANALYSIS IN SCANNING AUGER MICROSCOPY [J].

BROWNING, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (05) :1959-1964

[9]

DREBIN RA, 1988, SIGGRAPH, V24, P65

[10]

FIREDER G, 1985, IEEE COMPUT GRAPH, V5, P52

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