THE CHEMICAL STAIN INSPECTION OF POLYSILICON SOLAR CELL WAFER BY THE FUZZY THEORY METHOD

被引：6

作者：

Lin, Chern-Sheng ^{[1
]}

Lin, Chih-Wei ^{[2
]}

Yang, Shih-Wei ^{[3
]}

Lin, Shir-Kuan ^{[3
]}

Chiu, Chuang-Chien ^{[1
]}

机构：

[1] Feng Chia Univ, Dept Automat Control Engn, Taichung 40724, Taiwan

[2] Wonder Syst Corp, Taichung, Taiwan

[3] Natl Chiao Tung Univ, Inst Elect & Control Engn, Hsinchu, Taiwan

来源：

INTELLIGENT AUTOMATION AND SOFT COMPUTING | 2013年 / 19卷 / 03期

关键词：

Solar wafer; Laser-reflection-point based AOI method; Chemical stain inspection; Fuzzy theory; Back-propagation; Image binarization algorithm; Stain recognition; CRYSTALLINE SILICON; DEFECT;

D O I：

10.1080/10798587.2013.778052

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This study proposed an automatic optical inspection (AOI) technique to improve the inspection of chemical stains on solar wafers. Poly-silicon solar cell wafers were inspected for chemical stains, and the inspection was rapid and stable. The system used a laser-reflection-point-based AOI method for solar wafer chemical stain inspection. Based on the fuzzy theory, the image binarization algorithm could efficiently filter irrelevant image information, and the back-propagation method was also utilized to determine if the image was stained. The inspection algorithm integrated fuzzy theory and the back-propagation method in order to shorten the comparison time and quickly find the target. The experiment proved that the validity of the proposed method could achieve a recognition rate of 98% from among 1000 images.

引用

页码：391 / 406

页数：16

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