Ultralow-loss silicon ring resonators

被引:153
作者
Biberman, Aleksandr [1 ]
Shaw, Michael J. [2 ]
Timurdogan, Erman [1 ]
Wright, Jeremy B. [2 ]
Watts, Michael R. [1 ]
机构
[1] MIT, Elect Res Lab, Cambridge, MA 02139 USA
[2] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
WAVE-GUIDES; PROPAGATION LOSS; CHIP; FABRICATION; LIMIT;
D O I
10.1364/OL.37.004236
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We experimentally demonstrate silicon ring resonators with internal quality factors of Q(0) = 2.2 x 10(7), corresponding to record 2.7 dB/m propagation losses. Importantly, we show that these propagation losses are limited by bend loss, indicating that the propagation loss limit for silicon has not yet been reached. (C) 2012 Optical Society of America
引用
收藏
页码:4236 / 4238
页数:3
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