Current-voltage characteristics of thin film SnO2 gas sensors: Electronic artifacts and gas response

被引：0
|
作者：
Steimer, G [1 ]
Sulz, G [1 ]
Kuhner, G [1 ]
Reiter, H [1 ]
Hoefer, U [1 ]
Steiner, K [1 ]
机构：
[1] FRAUNHOFER INST PHYS MESSTECH, D-79110 FREIBURG, GERMANY
来源：
SENSORS AND MATERIALS | 1997年 / 9卷 / 02期
关键词：
SnO2; gas sensor; platinum; contact area; IV characteristic;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Current-voltage characteristics of implanted thin film SnO2 gas sensors are measured in various gas atmospheres. The gas-sensitive SnO2 layers are contacted with Pt electrodes. The metal semiconductor contacts show poor rectifying characteristics. Pd-, Pt-, Sb-, In-, Ni- and Ca-implanted sensors are investigated. Gas response and signal drift are strongly dependent on the sensor current-voltage operating point. Depending on the bias voltage artifacts which seriously distort gas response pattern can be produced. CO, CO2, NH3, NO2 and CH4 responses in humid air are discussed.
引用
收藏
页码：107 / 116
页数：10
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