The Remarkable Thermal Stability of Amorphous In-Zn-O Transparent Conductors

被引：172

作者：

Taylor, Matthew P.

Readey, Dennis W.

van Hest, Maikel F. A. M. ^{[1
]}

Teplin, Charles W. ^{[1
]}

Alleman, Jeff L. ^{[1
]}

Dabney, Matthew S. ^{[1
]}

Gedvilas, Lynn M. ^{[1
]}

Keyes, Brian M. ^{[1
]}

To, Bobby ^{[1
]}

Perkins, John D. ^{[1
]}

Ginley, David S. ^{[1
]}

机构：

[1] Natl Renewable Energy Lab, Golden, CO 80401 USA

来源：

ADVANCED FUNCTIONAL MATERIALS | 2008年 / 18卷 / 20期

关键词：

D O I：

10.1002/adfm.200700604

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Transparent conducting oxides (TCOs) are increasingly critical components in photovoltaic cells, low-a windows, flat panel displays, electrochromic devices, and flexible electronics. The conventional TCOs, such as Sn-doped In2O3, are crystalline single phase materials. Here, we report on In-Zn-O (IZO), a compositionally tunable amorphous TCO with some significantly improved properties. Compositionally graded thin film samples were deposited by co-sputtering from separate In2O3 and ZnO targets onto glass substrates at 100 C. For the metals composition range of 55-84 cation% indium, the as-deposited IZO thin films are amorphous, smooth (R-RMS < 0.4 nm), conductive (sigma 3000 Omega(-1) . cm(-1)), and transparent in the visible (T-Vis > 90%). Furthermore, the amorphous IZO thin films demonstrate remarkable functional and structural stability with respect to heating up to 600 degrees C in either air or argon. Hence, though not completely understood at present, these amorphous materials constitute a new class of fundamentally interesting and technologically important high performance transparent conductors.

引用

页码：3169 / 3178

页数：10

共 49 条

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