DEPOSITION OF SiOx CONTAINING DLC FILMS USING DIFFERENT TRANSPORT GAS IN A CLOSED DRIFT ION BEAM SOURCE

被引：0

作者：

Tamuleviciene, Asta ^{[1
]}

Kopustinskas, Vitoldas ^{[1
]}

Meskinis, Sarunas ^{[1
]}

Tamulevicius, Sigitas ^{[1
]}

机构：

[1] Kaunas Univ Technol, Inst Mat Sci, LT-50131 Kaunas, Lithuania

来源：

3RD INTERNATIONAL CONFERENCE RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2010 | 2010年

关键词：

SiOx doped diamond like carbon; transport gas; optical properties; CARBON-FILMS; AMORPHOUS-CARBON;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, the diamond like carbon layers were formed employing hexamethyldisiloxane and different transport gas (hydrogen or helium) in a closed drift ion beam deposition system. Films were formed on crystalline silicon (for thickness determination and reflective properties) and quartz (for analysis of optical properties). Optical properties of the samples were analyzed in the wavelength range from 200 to 1000 nm. The main optical parameters (refractive index, bandgap) were determined and the influence of transport gas on optical properties of the films was analyzed.

引用

页码：169 / 172

页数：4

共 7 条

[1] Carbon content influence on the optical constants of hydrogenated amorphous silicon carbon alloys [J].