Plasma Enhanced Chemical Vapour Deposition of Horizontally Aligned Carbon Nanotubes

被引:13
作者
Cole, Matthew T. [1 ,2 ]
Milne, William I. [1 ,3 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
[2] AIXTRON Ltd, Cambridge CB24 4FQ, England
[3] Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea
关键词
carbon nanotube; in situ horizontal alignment; plasma enhanced chemical vapor deposition; electric field; FIELD-EMISSION; GROWTH; LONG; GRAPHOEPITAXY; TEMPERATURE; ALIGNMENT; SPARSE; ARRAYS;
D O I
10.3390/ma6062262
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A plasma-enhanced chemical vapour deposition reactor has been developed to synthesis horizontally aligned carbon nanotubes. The width of the aligning sheath was modelled based on a collisionless, quasi-neutral, Child's law ion sheath where these estimates were empirically validated by direct Langmuir probe measurements, thereby confirming the proposed reactors ability to extend the existing sheath fields by up to 7 mm. A 7 mbar growth atmosphere combined with a 25 W plasma permitted the concurrent growth and alignment of carbon nanotubes with electric fields of the order of 0.04 V mu m(-1) with linear packing densities of up to similar to 5 x 10(4) cm(-1). These results open up the potential for multi-directional in situ alignment of carbon nanotubes providing one viable route to the fabrication of many novel optoelectronic devices.
引用
收藏
页码:2262 / 2273
页数:12
相关论文
共 49 条
  • [1] Ago H, 1999, ADV MATER, V11, P1281, DOI 10.1002/(SICI)1521-4095(199910)11:15<1281::AID-ADMA1281>3.0.CO
  • [2] 2-6
  • [3] Carbon nanotubes by plasma-enhanced chemical vapor deposition
    Bell, Martin S.
    Teo, Kenneth B. K.
    Lacerda, Rodrigo G.
    Milne, W. I.
    Hash, David B.
    Meyyappan, M.
    [J]. PURE AND APPLIED CHEMISTRY, 2006, 78 (06) : 1117 - 1125
  • [4] Computations of local electric field and electric forces acting on carbon nanotubes in a direct current plasma sheath
    Blazek, J
    Spatenka, P
    Pácal, F
    Täschner, C
    Leonhardt, A
    [J]. THIN SOLID FILMS, 2005, 489 (1-2) : 291 - 295
  • [5] Plasma-induced alignment of carbon nanotubes
    Bower, C
    Zhu, W
    Jin, SH
    Zhou, O
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (06) : 830 - 832
  • [6] Ultrathin Films of Single-Walled Carbon Nanotubes for Electronics and Sensors: A Review of Fundamental and Applied Aspects
    Cao, Qing
    Rogers, John A.
    [J]. ADVANCED MATERIALS, 2009, 21 (01) : 29 - 53
  • [7] Directed growth of free-standingsingle-walled carbon nanotubes
    Cassell, AM
    Franklin, NR
    Tombler, TW
    Chan, EM
    Han, J
    Dai, HJ
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1999, 121 (34) : 7975 - 7976
  • [8] Chapman N.B, 1980, GLOW DISCHARGE PROCE
  • [9] Aligned conical carbon nanotubes
    Chen, Y
    Guo, LP
    Patel, S
    Shaw, DT
    [J]. JOURNAL OF MATERIALS SCIENCE, 2000, 35 (21) : 5517 - 5521
  • [10] Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition
    Chhowalla, M
    Teo, KBK
    Ducati, C
    Rupesinghe, NL
    Amaratunga, GAJ
    Ferrari, AC
    Roy, D
    Robertson, J
    Milne, WI
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) : 5308 - 5317