Hollow cathode and hybrid atmospheric plasma sources

被引：5
作者：
Barankova, Hana [1 ]
Bardos, Ladislav [1 ]
机构：
[1] Uppsala Univ, Angstrom Lab, Plasma Grp, SE-75121 Uppsala, Sweden
来源：
PURE AND APPLIED CHEMISTRY | 2008年 / 80卷 / 09期
关键词：
fused hollow cathode; cold atmospheric plasma; hybrid plasma; air plasma; gas conversion;
D O I：
10.1351/pac200880091931
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Generation and features of the radio frequency (RF) hollow cathode discharge (HCD) are compared for the atmospheric and moderate pressures. The atmospheric-pressure plasma systems, fused hollow cathode (FHC) and hybrid hollow electrode-activated discharge (H-HEAD), are described. Examples of applications where both FHC and H-HEAD have already been employed are given, and potentials for new processes are discussed.
引用
收藏
页码：1931 / 1937
页数：7
相关论文
共 24 条
[1]  
Barankova H, 1998, ELEC SOC S, V97, P348
[2]   Hollow cathode and hybrid plasma processing [J].
Baránková, H ;
Bardos, L .
VACUUM, 2006, 80 (07) :688-692
[3]   Cold atmospheric plasma in nitrogen and air generated by the hybrid plasma source [J].
Barankova, H. ;
Bardos, L. ;
Soderstrom, D. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (04) :1410-1413
[4]   Hollow cathode atmospheric pressure plasma sources for surface treatment [J].
Baránková, H ;
Bárdos, L .
SURFACE & COATINGS TECHNOLOGY, 2003, 174 :63-67
[5]   Hollow cathode cold atmospheric plasma source with monoatomic and molecular gases [J].
Baránková, H ;
Bárdos, L .
SURFACE & COATINGS TECHNOLOGY, 2003, 163 :649-653
[6]   Effect of gas and cathode material on the r.f. hollow cathode reactive PVD [J].
Baránková, H ;
Bárdos, L .
SURFACE & COATINGS TECHNOLOGY, 1999, 120 :704-708
[7]   Fused hollow cathode cold atmospheric plasma [J].
Baránková, H ;
Bárdos, L .
APPLIED PHYSICS LETTERS, 2000, 76 (03) :285-287
[8]  
Barankova H, [Sw. patents, U.S. Pat.], Patent No. [9901527/3 and 0000167/7, PCT/SE00/00791, 6,524,538, 6524538]
[9]  
BARANKOVA H, Patent No. 0000791
[10]  
BARANKOVA H, 2006, 49 ANN TECHN C P SOC, P41
123