Controlling Conductive Filament and Tributyrin Sensing Using an Optimized Porous Iridium Interfacial Layer in Cu/Ir/TiNxOy/TiN

被引:30
作者
Dutta, Mrinmoy [1 ]
Maikap, Siddheswar [1 ,2 ]
Qiu, Jiantai Timothy [2 ,3 ]
机构
[1] Chang Gung Univ, Thin Film Nanotech Lab, Dept Elect Engn, 259 Wen Hwa 1st Rd, Taoyuan 33302, Taiwan
[2] Chang Gung Mem Hosp, Div Gynecol Oncol, Dept Obstet Gynecol, Taoyuan 33302, Taiwan
[3] Chang Gung Univ, Dept Biomed Sci, Sch Med, Taoyuan 33302, Taiwan
来源
ADVANCED ELECTRONIC MATERIALS | 2019年 / 5卷 / 02期
关键词
controlling filament; interfacial layer; pH sensitivity; porous Ir; tributyrin detection; RESISTIVE SWITCHING MEMORY; THIN-FILMS; LOW-POWER; OXIDE; MECHANISM; TRIGLYCERIDES; ELECTRODE; SENSORS; DIODE;
D O I
10.1002/aelm.201800288
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Controlling the copper (Cu) filament using an optimized porous iridium (Ir) interfacial layer thickness ranging from 2 to 20 nm in a Cu/Ir/TiNxOyTiN resistive switching memory device is investigated for the first time. Transmission electron microscopy (TEM) shows a porous Ir layer, and X-ray photoelectron spectroscopy (XPS) is performed to determine the Ir-0,Ir3+/Ir4+ oxidation states, which are responsible for a super-Nernstian pH sensitivity of 125.5 mV pH(-1) as well as a low concentration of 1 x 10(-12) M tributyrin detected using a 40 n m thick Ir in Ir/TiNxOyTiN structure. The 5 nm thick Ir layer in the Cu/Ir/TiNxOyTiN structure shows current-voltage switching characteristics for 3000 consecutive cycles, a stable RESET voltage, a long program/erase (P/E) endurance of >10(9) cycles under a P/E current of 300 mu A at a high speed of 100 ns, and neuromorphic phenomena compared to those of other Ir thicknesses. Cu migration into the TiNxOy oxide-electrolyte is shown by TEM observations. The tributyrin detection ranging from 1 x 10(-12) to 100 x 10(-12) M using a resistive switching memory device paves the way for the early diagnosis of human diseases as well as artificial intelligence applications in the near future.
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页数:11
相关论文
共 61 条
[1]   Switching operation and degradation of resistive random access memory composed of tungsten oxide and copper investigated using in-situ TEM [J].
Arita, Masashi ;
Takahashi, Akihito ;
Ohno, Yuuki ;
Nakane, Akitoshi ;
Tsurumaki-Fukuchi, Atsushi ;
Takahashi, Yasuo .
SCIENTIFIC REPORTS, 2015, 5
[2]   Effects of Ti Buffer Layer on Retention and Electrical Characteristics of Cu-Based Conductive-Bridge Random Access Memory (CBRAM) [J].
Attarimashalkoubeh, Behnoush ;
Prakash, Amit ;
Lee, Sangheon ;
Song, Jeonghwan ;
Woo, Jiyong ;
Misha, Saiful Haque ;
Tamanna, Nusrat ;
Hwang, Hyunsang .
ECS SOLID STATE LETTERS, 2014, 3 (10) :P120-P122
[3]   ESCA STUDY OF THE STATE OF IRIDIUM AND OXYGEN IN ELECTROCHEMICALLY AND THERMALLY FORMED IRIDIUM OXIDE-FILMS [J].
AUGUSTYNSKI, J ;
KOUDELKA, M ;
SANCHEZ, J ;
CONWAY, BE .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1984, 160 (1-2) :233-248
[4]   Bilayer Metal-Oxide Conductive Bridge Memory Technology for Improved Window Margin and Reliability [J].
Barci, Marinela ;
Molas, Gabriel ;
Cagli, Carlo ;
Vianello, Elisa ;
Bernard, Mathieu ;
Roule, Anne ;
Toffoli, Alain ;
Cluzel, Jacques ;
De Salvo, Barbara ;
Perniola, Luca .
IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2016, 4 (05) :314-320
[5]   A Thermally Stable and High-Performance 90-nm Al2O3\Cu-Based 1T1R CBRAM Cell [J].
Belmonte, Attilio ;
Kim, Woosik ;
Chan, Boon Teik ;
Heylen, Nancy ;
Fantini, Andrea ;
Houssa, Michel ;
Jurczak, Malgorzata ;
Goux, Ludovic .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (11) :3690-3695
[6]   Chlorate ion mediated rutile to anatase reverse phase transformation in the TiO2 nanosystem [J].
Bhosale, Reshma ;
Hyam, Rajesh ;
Dhanya, P. ;
Ogale, Satishchandra .
DALTON TRANSACTIONS, 2011, 40 (43) :11374-11377
[7]  
BioVision, 2018, TRIGL QUANT COL FLUO
[8]  
Birks N., 2006, Introduction to the High Temperature Oxidation of Metals, V2nd
[9]   Neuromorphic computing using non-volatile memory [J].
Burr, Geoffrey W. ;
Shelby, Robert M. ;
Sebastian, Abu ;
Kim, Sangbum ;
Kim, Seyoung ;
Sidler, Severin ;
Virwani, Kumar ;
Ishii, Masatoshi ;
Narayanan, Pritish ;
Fumarola, Alessandro ;
Sanches, Lucas L. ;
Boybat, Irem ;
Le Gallo, Manuel ;
Moon, Kibong ;
Woo, Jiyoo ;
Hwang, Hyunsang ;
Leblebici, Yusuf .
ADVANCES IN PHYSICS-X, 2017, 2 (01) :89-124
[10]   Three-Dimensional Observation of the Conductive Filament in Nanoscaled Resistive Memory Devices [J].
Celano, Umberto ;
Goux, Ludovic ;
Belmonte, Attilio ;
Opsomer, Karl ;
Franquet, Alexis ;
Schulze, Andreas ;
Detavernier, Christophe ;
Richard, Olivier ;
Bender, Hugo ;
Jurczak, Malgorzata ;
Vandervorst, Wilfried .
NANO LETTERS, 2014, 14 (05) :2401-2406