Combined dynamic and steady-state infrared camera based carrier lifetime imaging of silicon wafers

被引：24

作者：

Ramspeck, Klaus ^{[1
,2
]}

Bothe, Karsten ^{[1
]}

Schmidt, Jan ^{[1
]}

Brendel, Rolf ^{[1
]}

机构：

[1] ISFH, D-31860 Emmerthal, Germany

[2] SCHOTT Solar AG, D-63755 Alzenau, Bavaria, Germany

来源：

JOURNAL OF APPLIED PHYSICS | 2009年 / 106卷 / 11期

关键词：

carrier lifetime; data acquisition; infrared imaging; silicon; CRYSTALLINE SILICON; ABSORPTION;

D O I：

10.1063/1.3261733

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on a calibration-free dynamic carrier lifetime imaging technique yielding spatially resolved carrier lifetime maps of silicon wafers within data acquisition times of seconds. Our approach is based on infrared lifetime mapping (ILM), which exploits the proportionality between the measured infrared emission and the free carrier density. Dynamic ILM determines the lifetime analytically from the signal ratio of infrared camera images recorded directly after turning on an excitation source and after steady-state conditions are established within the sample. We investigate the applicability of dynamic infrared lifetime mapping on silicon wafers with rough surfaces, study the impact of injection dependencies, and examine the technical requirements for measuring low lifetime values in the range of microseconds. While the dynamic ILM approach is suitable for lifetimes exceeding 10 mu s, a combination with steady-state ILM is required to measure lifetime values in the range of 1 mu s. The injection dependence does not hamper a correct determination of the carrier lifetime by the dynamic evaluation procedure.

引用

页数：10

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