Oxidative etching of diamond

被引:91
作者
de Theije, FK [1 ]
Roy, O [1 ]
van der Laag, NJ [1 ]
van Enckevort, WJP [1 ]
机构
[1] Univ Nijmegen, Fac Sci, RIM Dept Solid State Chem, Nijmegen, Netherlands
关键词
etching; oxygen;
D O I
10.1016/S0925-9635(99)00239-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Three different ways are used to etch diamond {001} and {111} faces by oxidative methods: gas phase etching in dry oxygen, gas phase etching in a mixture of oxygen and water vapour, and liquid etching in molten potassium nitrate. The surface topography of the etched surfaces is compared with the theoretically predicted morphology. It appears that in most cases the experimental results are in contradiction to theory. These discrepancies are explained by the reactions between the diamond surfaces and the adsorbed oxygen, which are able either to stabilise or to destabilise the surfaces. Of these three methods, etching in molten potassium nitrate was found to be the best for revealing dislocations. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:929 / 934
页数:6
相关论文
共 18 条
  • [1] VAPOR-PHASE OXIDATION OF DIAMOND SURFACES IN O2 STUDIED BY DIFFUSE-REFLECTANCE FOURIER-TRANSFORM INFRARED AND TEMPERATURE-PROGRAMMED DESORPTION SPECTROSCOPY
    ANDO, T
    YAMAMOTO, K
    ISHII, M
    KAMO, M
    SATO, Y
    [J]. JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS, 1993, 89 (19): : 3635 - 3640
  • [2] DETHEIJE FK, 1999, IN PRESS PHILOS MAG
  • [3] ETCHING OF DIAMOND SURFACES WITH GASES
    EVANS, T
    SAUTER, DH
    [J]. PHILOSOPHICAL MAGAZINE, 1961, 6 (63): : 429 - &
  • [4] ETCH PITS AND TRIGONS ON DIAMOND .1.
    FRANK, FC
    PUTTICK, KE
    WILKS, EM
    [J]. PHILOSOPHICAL MAGAZINE, 1958, 3 (35): : 1262 - 1272
  • [5] ON THE INFLUENCE OF SURFACE RECONSTRUCTION ON CRYSTAL-GROWTH PROCESSES
    GILING, LJ
    VANENCKEVORT, WJP
    [J]. SURFACE SCIENCE, 1985, 161 (2-3) : 567 - 583
  • [6] PLANARIZING TECHNIQUE FOR ION-BEAM POLISHING OF DIAMOND FILMS
    GROGAN, DF
    ZHAO, T
    BOVARD, BG
    MACLEOD, HA
    [J]. APPLIED OPTICS, 1992, 31 (10): : 1483 - 1487
  • [7] A TENSIOMETRIC STUDY OF DIAMOND (111) AND (110) FACES
    HANSEN, JO
    COPPERTHWAITE, RG
    DERRY, TE
    PRATT, JM
    [J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1989, 130 (02) : 347 - 358
  • [8] ON THE RELATIONS BETWEEN STRUCTURE AND MORPHOLOGY OF CRYSTALS .2.
    HARTMAN, P
    PERDOK, WG
    [J]. ACTA CRYSTALLOGRAPHICA, 1955, 8 (09): : 521 - 524
  • [9] NON-UNIFORM DISTRIBUTION OF FACES IN A ZONE
    HARTMAN, P
    [J]. ZEITSCHRIFT FUR KRISTALLOGRAPHIE, 1965, 121 (01): : 78 - &
  • [10] HIROSE Y, 1986, JPN J APPL PHYS, V125, P519