High-speed tuning of visible laser wavelength using a nanoimprinted grating optical tunable filter

被引：13

作者：

Huang, Nien-Tsu ^{[1
]}

Truxal, Steven C. ^{[1
]}

Tung, Yi-Chung ^{[2
]}

Hsiao, Amy ^{[2
]}

Takayama, Shuichi ^{[2
]}

Kurabayashi, Katsuo ^{[1
,3
]}

机构：

[1] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA

[2] Univ Michigan, Dept Biomed Engn, Ann Arbor, MI 48109 USA

[3] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 21期

关键词：

diffraction gratings; elemental semiconductors; fibre lasers; microactuators; nanolithography; optical filters; optical tuning; silicon; soft lithography; SINGLE MOLECULES; EXCITATION; SPECTROSCOPY; ACTUATORS; SILICON; LIGHT;

D O I：

10.1063/1.3267083

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on a microelectromechanical tunable optical filter incorporating strain-tunable nanoimprinted elastomeric grating with a pitch varied by 18%. This device enables tuning of optical fiber-guided laser wavelength between lambda=473 and 532 nm within 0.5 ms by mechanically modulating the pitch with a silicon microactuator. We also demonstrate the use of the device for obtaining two-color images of live/dead-stained cells with the color intensity ratio varied by the actuator voltage applied. The small structure of the device integrated on a silicon chip may be used in portable systems for optical switching and spectroscopy.

引用

页数：3