High-speed tuning of visible laser wavelength using a nanoimprinted grating optical tunable filter

被引：13
作者：
Huang, Nien-Tsu [1 ]
Truxal, Steven C. [1 ]
Tung, Yi-Chung [2 ]
Hsiao, Amy [2 ]
Takayama, Shuichi [2 ]
Kurabayashi, Katsuo [1 ,3 ]
机构：
[1] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Dept Biomed Engn, Ann Arbor, MI 48109 USA
[3] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
来源：
APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 21期
关键词：
diffraction gratings; elemental semiconductors; fibre lasers; microactuators; nanolithography; optical filters; optical tuning; silicon; soft lithography; SINGLE MOLECULES; EXCITATION; SPECTROSCOPY; ACTUATORS; SILICON; LIGHT;
D O I：
10.1063/1.3267083
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report on a microelectromechanical tunable optical filter incorporating strain-tunable nanoimprinted elastomeric grating with a pitch varied by 18%. This device enables tuning of optical fiber-guided laser wavelength between lambda=473 and 532 nm within 0.5 ms by mechanically modulating the pitch with a silicon microactuator. We also demonstrate the use of the device for obtaining two-color images of live/dead-stained cells with the color intensity ratio varied by the actuator voltage applied. The small structure of the device integrated on a silicon chip may be used in portable systems for optical switching and spectroscopy.
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页数：3
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