High-speed tuning of visible laser wavelength using a nanoimprinted grating optical tunable filter

被引：13

作者：

Huang, Nien-Tsu ^{[1
]}

Truxal, Steven C. ^{[1
]}

Tung, Yi-Chung ^{[2
]}

Hsiao, Amy ^{[2
]}

Takayama, Shuichi ^{[2
]}

Kurabayashi, Katsuo ^{[1
,3
]}

机构：

[1] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA

[2] Univ Michigan, Dept Biomed Engn, Ann Arbor, MI 48109 USA

[3] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 21期

关键词：

diffraction gratings; elemental semiconductors; fibre lasers; microactuators; nanolithography; optical filters; optical tuning; silicon; soft lithography; SINGLE MOLECULES; EXCITATION; SPECTROSCOPY; ACTUATORS; SILICON; LIGHT;

D O I：

10.1063/1.3267083

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on a microelectromechanical tunable optical filter incorporating strain-tunable nanoimprinted elastomeric grating with a pitch varied by 18%. This device enables tuning of optical fiber-guided laser wavelength between lambda=473 and 532 nm within 0.5 ms by mechanically modulating the pitch with a silicon microactuator. We also demonstrate the use of the device for obtaining two-color images of live/dead-stained cells with the color intensity ratio varied by the actuator voltage applied. The small structure of the device integrated on a silicon chip may be used in portable systems for optical switching and spectroscopy.

引用

页数：3

共 31 条

[1] An optical wavelength filter with reduced crosstalk consisting of a Si arrayed-waveguide grating and Bragg tunable grating filters
Yagi, Yuta
Takai, Yuta
Tsuda, Hiroyuki
2023 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING AND COMPUTING, PSC, 2023,
[2] MULTI-SPECTRAL TUNABLE EXCITATION FLUORESCENCE MICROSCOPY WITH A NANOIMPRINTED PDMS-ON-SILICON GRATING OPTICAL FILTER
Huang, N. -T.
Truxal, S.
Tung, Y. -C.
Kurabayashi, K.
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
[3] Reconfigurable optical wavelength multiplexer using a MEMS tunable blazed grating
Antoine, Christophe
Li, Xiang
Wang, Jen-Shiang
Solgaard, Olav
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2007, 25 (10) : 3100 - 3107
[4] Optical tuning of Si3N4 ring resonators using an external short visible wavelength laser source
Jenkins, Shelbi L.
Showghi, Sasaan A.
Norwood, Robert A.
OSA CONTINUUM, 2021, 4 (05) : 1669 - 1675
[5] Color Filter Based on a Sub-Wavelength Patterned Poly-Silicon Grating Fabricated using Laser Interference Lithography
Yoon, Yeo-Taek
Lee, Hong-Shik
Lee, Sang-Shin
Kim, Sang Hoon
Park, Joo-Do
Lee, Ki-Dong
KOREAN JOURNAL OF OPTICS AND PHOTONICS, 2008, 19 (01) : 20 - 24
[6] High-accuracy laser-wavelength detection using a synchro-scanned optical disk filter
Katagiri, Y
Aida, K
Tachikawa, Y
Nagaoka, S
Abe, H
Ohira, F
IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (01) : 102 - 104
[7] Experimental demonstration of an ultraselective and tunable optical bandpass filter using a fibre grating and a Fabry-Perot
Ortega, B
Capmany, J
Pastor, D
Laming, RI
ELECTRONICS LETTERS, 1997, 33 (08) : 669 - 671
[8] Widely tunable asymmetric long-period fiber grating with high sensitivity using optical polymer on laser-ablated cladding
Chen, Nan-Kuang
Hsu, Der-Yi
Chi, Sien
OPTICS LETTERS, 2007, 32 (15) : 2082 - 2084
[9] Ultra-high-speed pumping of an optical parametric oscillator (OPO) for high-speed laser-induced fluorescence measurements
Sjoholm, Johan
Kristensson, Elias
Richter, Mattias
Alden, Marcus
Goritz, Guido
Knebel, Kai
MEASUREMENT SCIENCE AND TECHNOLOGY, 2009, 20 (02)
[10] A high-speed particle-detection in a large area using line-laser light scattering
Kim, Min Su
Choi, Hyeun-Seok
Lee, Seung Hee
Kim, Chanjoong
CURRENT APPLIED PHYSICS, 2015, 15 (08) : 930 - 937

← 1 2 3 4 →