Ultra-thin silicon-on-insulator strip waveguides and mode couplers

被引：19

作者：

Gould, Michael ^{[1
]}

Pomerene, Andrew ^{[2
]}

Hill, Craig ^{[2
]}

Ocheltree, Stewart ^{[2
]}

Zhang, Yi ^{[3
]}

Baehr-Jones, Tom ^{[3
]}

Hochberg, Michael ^{[3
,4
,5
]}

机构：

[1] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA

[2] BAE Syst, Semicond Technol Ctr, Manassas, VA 20110 USA

[3] Univ Delaware, Dept Elect & Comp Engn, Newark, DE 19716 USA

[4] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 119077, Singapore

[5] A STAR Inst Microelect, Singapore 117685, Singapore

来源：

APPLIED PHYSICS LETTERS | 2012年 / 101卷 / 22期

基金：

加拿大自然科学与工程研究理事会;

关键词：

PHOTODETECTOR; PHOTONICS;

D O I：

10.1063/1.4768296

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate an ultra-thin silicon waveguide for wavelengths around 1.55 mu m, and mode converters designed for transitions to and from standard 500 nm x 220 nm strip waveguides. The devices were fabricated in a CMOS-compatible process requiring two photolithography and etch steps. The ultrathin waveguides exhibited losses of 2.01 +/- 0.231 dB/cm, exhibited bend radii as small as 30 mu m with losses of 0.05 +/- 0.005 dB per bend, and exhibited coupling losses of 0.66 +/- 0.014 dB to standard strip waveguides. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4768296]

引用

页数：3

共 19 条

[1] Nanotaper for compact mode conversion [J].

Almeida, VR ;

Panepucci, RR ;

Lipson, M .

OPTICS LETTERS, 2003, 28 (15) :1302-1304

[2]

[Anonymous], NUMERICAL RECIPES C

[3] CMOS-integrated high-speed MSM germanium waveguide photodetector [J].

Assefa, Solomon ;

Xia, Fengnian ;

Bedell, Stephen W. ;

Zhang, Ying ;

Topuria, Teya ;

Rice, Philip M. ;

Vlasov, Yurii A. .

OPTICS EXPRESS, 2010, 18 (05) :4986-4999

[4] Low loss etchless silicon photonic waveguides [J].

Cardenas, Jaime ;

Poitras, Carl B. ;

Robinson, Jacob T. ;

Preston, Kyle ;

Chen, Long ;

Lipson, Michal .

OPTICS EXPRESS, 2009, 17 (06) :4752-4757

[5]

Doerr C. R., 2009, C OPT FIB COMM 2009, P1

[6] Low loss shallow-ridge silicon waveguides [J].

Dong, Po ;

Qian, Wei ;

Liao, Shirong ;

Liang, Hong ;

Kung, Cheng-Chih ;

Feng, Ning-Ning ;

Shafiiha, Roshanak ;

Fong, Joan ;

Feng, Dazeng ;

Krishnamoorthy, Ashok V. ;

Asghari, Mehdi .

OPTICS EXPRESS, 2010, 18 (14) :14474-14479

[7] Vertical p-i-n germanium photodetector with high external responsivity integrated with large core Si waveguides [J].

Feng, Ning-Ning ;

Dong, Po ;

Zheng, Dawei ;

Liao, Shirong ;

Liang, Hong ;

Shafiiha, Roshanak ;

Feng, Dazeng ;

Li, Guoliang ;

Cunningham, John E. ;

Krishnamoorthy, Ashok V. ;

Asghari, Mehdi .

OPTICS EXPRESS, 2010, 18 (01) :96-101

[8] High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode [J].

Gardes, F. Y. ;

Brimont, A. ;

Sanchis, P. ;

Rasigade, G. ;

Marris-Morini, D. ;

O'Faolain, L. ;

Dong, F. ;

Fedeli, J. M. ;

Dumon, P. ;

Vivien, L. ;

Krauss, T. F. ;

Reed, G. T. ;

Marti, J. .

OPTICS EXPRESS, 2009, 17 (24) :21986-21991

[9] Towards fabless silicon photonics [J].

Hochberg, Michael ;

Baehr-Jones, Tom .

NATURE PHOTONICS, 2010, 4 (08) :492-494

[10] Silicon photonics [J].

Jalali, Bahrain ;

Fathpour, Sasan .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2006, 24 (12) :4600-4615

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