SU-8 micromachined WR-3 band waveguide bandpass filter with low insertion loss

被引:25
作者
Chen, Q. [1 ]
Shang, X. [2 ]
Tian, Y. [2 ]
Xu, J. [1 ]
Lancaster, M. J. [2 ]
机构
[1] Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
[2] Univ Birmingham, Sch Elect Elect & Comp Engn, Birmingham B15 2TT, W Midlands, England
基金
英国工程与自然科学研究理事会;
关键词
Compendex;
D O I
10.1049/el.2013.0277
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Presented is a WR-3 band (220-325 GHz) waveguide bandpass filter, which is constructed from three offset waveguide resonators operating at TE101 mode. This directly coupled resonator filter with Chebyshev response is designed to have a centre frequency of 300 GHz, a fractional bandwidth of 3.3% and a passband return loss of 20 dB. This filter is fabricated using thick SU-8 photoresist micromachining technique and has been tested. The measured average passband insertion loss is as low as around 0.4 dB. The measured return loss is better than 15 dB across the whole passband.
引用
收藏
页码:480 / 481
页数:2
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